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公开(公告)号:EP2128876B1
公开(公告)日:2013-05-22
申请号:EP08721503.4
申请日:2008-03-06
IPC分类号: C23C14/08 , C23C14/02 , C23C14/58 , H01B1/08 , C03C17/245
CPC分类号: C23C14/083 , C03C17/2456 , C03C2217/212 , C03C2217/218 , C03C2217/24 , C03C2218/15 , C03C2218/32 , C23C14/024 , C23C14/08 , C23C14/5806 , G02F1/13439 , H01B1/08 , H01L51/442
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公开(公告)号:EP2184743A1
公开(公告)日:2010-05-12
申请号:EP08828296.7
申请日:2008-08-27
IPC分类号: H01B13/00 , C23C14/08 , G02F1/1343
CPC分类号: C23C14/083 , C03C17/2456 , C03C2217/212 , C03C2217/218 , C03C2217/24 , C03C2218/15 , C03C2218/32 , C23C14/0036 , C23C14/352 , G02F1/13439
摘要: To provide a process capable of producing a titanium oxide electric conductor layer having excellent electric conductivity and good transparency, with high productivity.
A first layer and a second layer each made of titanium oxide doped with a dopant such as Nb, are formed in order on a substrate in a state where the substrate is heated to prepare an electric conductor layer comprising an electric conductor layer. The first layer is formed under film formation conditions under which it is a layer containing polycrystals which contain no rutile crystals. The second layer is formed under film formation conditions under which a layer containing polycrystals which contain rutile crystals is obtained when directly formed on a substrate.摘要翻译: 提供能够以高生产率制造具有优异导电性和良好透明性的氧化钛导电体层的方法。 在衬底被加热的状态下,在衬底上依次形成由掺杂有诸如Nb的氧化钛制成的第一层和第二层,以制备包括导电层的导电体层。 第一层是在成膜条件下形成的,它是含有不含金红石晶体的多晶的层。 第二层在成膜条件下形成,在直接形成在基材上时,可以获得含有金红石结晶的多晶的层。
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公开(公告)号:EP2128876A1
公开(公告)日:2009-12-02
申请号:EP08721503.4
申请日:2008-03-06
IPC分类号: H01B13/00 , C23C14/06 , C23C14/08 , G02F1/1343 , G02F1/1345 , H01B5/14 , H01L51/50 , H05B33/28
CPC分类号: C23C14/083 , C03C17/2456 , C03C2217/212 , C03C2217/218 , C03C2217/24 , C03C2218/15 , C03C2218/32 , C23C14/024 , C23C14/08 , C23C14/5806 , G02F1/13439 , H01B1/08 , H01L51/442
摘要: To provide a process whereby a titanium oxide type electrical conductor excellent in electrical conductivity with good transparency can be produced with good productivity.
A process for producing an electrical conductor, which comprises a laminate-forming step of forming a precursor laminate having a first precursor layer and a second precursor layer laminated in an optional order on a substrate, and an annealing step of heating the precursor laminate in a reducing atmosphere for annealing to form a metal oxide layer from the first precursor layer and the second precursor layer, wherein the first precursor layer is a titanium oxide layer made of titanium oxide containing Nb, which, when subjected to a single layer annealing test, becomes a titanium oxide layer containing a polycrystal which is free from a rutile type crystal, and the second precursor layer is an amorphous titanium oxide layer made of titanium oxide containing Nb, which, when subjected to a single layer annealing test, becomes a titanium oxide layer containing a polycrystal which contains a rutile type crystal.摘要翻译: 为了提供能够以良好的生产率制造具有良好透明性的导电性优异的氧化钛型电导体的方法。 一种电导体的制造方法,其特征在于,包括层叠形成工序,其在基板上形成具有以任意顺序层叠的第一前体层和第二前体层的前体层叠体,以及退火工序, 还原气氛进行退火以从第一前体层和第二前体层形成金属氧化物层,其中第一前体层是由含有Nb的氧化钛制成的氧化钛层,当进行单层退火试验时, 包含不含金红石型晶体的多晶体的氧化钛层,第二前体层是由含有Nb的氧化钛制成的非晶态氧化钛层,当进行单层退火试验时,其成为氧化钛层 含有含有金红石型晶体的多晶体。
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公开(公告)号:EP2270819B1
公开(公告)日:2014-01-22
申请号:EP09725312.4
申请日:2009-03-05
CPC分类号: C23C14/083 , C23C14/5806
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公开(公告)号:EP2270819A1
公开(公告)日:2011-01-05
申请号:EP09725312.4
申请日:2009-03-05
CPC分类号: C23C14/083 , C23C14/5806
摘要: An electric conductor having good electric conductivity and excellent heat resistance, and a process for its production are provided.
An electric conductor comprising a substrate 10 and at least two layers formed on the substrate, each being a layer (Z) made of titanium oxide doped with at least one dopant selected from the group consisting of Nb, Ta, Mo, As, Sb, W, N, F, S, Se, Te, Cr, Ni, Tc, Re, P and Bi, wherein at least one layer among said at least two layers is a second layer (Z2) 12 wherein the percentage of the number of dopant atoms based on the total number of titanium and dopant atoms is from 0.01 to 4 atomic%; and between the second layer (Z2) 12 and the substrate 10, a first layer (Z1) 11 is formed wherein the percentage of the number of dopant atoms based on the total number of titanium and dopant atoms is larger than in the second layer (Z2).摘要翻译: 本发明提供导电性良好且耐热性优异的导电体及其制造方法。 一种电导体,包括衬底10和在衬底上形成的至少两个层,每个层是由氧化钛制成的层(Z),所述层由掺杂有选自Nb,Ta,Mo,As,Sb, W,N,F,S,Se,Te,Cr,Ni,Tc,Re,P和Bi,其中所述至少两层中的至少一层为第二层(Z2)12, 基于钛和掺杂剂原子总数的掺杂剂原子为0.01-4原子%; 并且在第二层(Z2)12和衬底10之间形成第一层(Z1)11,其中基于钛和掺杂剂原子的总数量的掺杂剂原子的数量的百分比大于第二层中的掺杂剂原子的数量的百分比( Z2)。
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