公开(公告)号：EP1750087B1

公开(公告)日：2011-12-21

申请号：EP05745755.8

申请日：2005-06-02

申请人： Asahi Glass Company, Limited

发明人： SONDA, Yoshiyuki c/o Asahi Glass Company, Ltd. ,  OTO, Kimiaki c/o Asahi Glass Company, Ltd. ,  KATO, Munehisa c/o Asahi Glass Company, Ltd. ,  KIYAMA, Atsushi c/o Asahi Glass Fine Techno Co,Ltd.

IPC分类号： G01B11/25

CPC分类号： G01N21/896 ,  G01N2021/9513

摘要： A method and an apparatus are provided for accurately inspecting characteristics of a front surface shape by eliminating influences of a rear surface reflection image by a low-cost apparatus constitution. First, a stripe pattern (1), which has a light and dark pattern and in which a reflection image made by being reflected by a front surface of a transparent board-shaped body (3) (object to be inspected) and a reflection image made by being reflected by a rear surface of the transparent board-shaped body are set to separate by an image signal obtained by image pickup, is decided, as a stripe pattern suitable for the transparent board-shaped body. Then, by using the decided stripe pattern (1), the front surface shape of the transparent board-shaped body (3) is evaluated by image analysis by using only the reflection image made by being reflected by the front surface of the transparent board-shaped body (3) of the stripe pattern (1).