公开(公告)号：EP1428058A2

公开(公告)日：2004-06-16

申请号：EP02770433.7

申请日：2002-08-23

申请人： Asylum Research Corporation

发明人： PROKSCH, Rogerc/o Asylum Research Corporation ,  CLEVELAND, Jasonc/o Asylum Research Corporation ,  BOCEK, Danc/o Asylum Research Corporation

IPC分类号： G02B7/04

CPC分类号： G01Q20/02 ,  G01Q70/06 ,  G02B26/0808

摘要： An apparatus and method for measuring optically the position or angle of a variety of objects or arrays of objects, including cantilevers in scanning probe microscopy, micromechanical biological and chemical sensors and the sample or a probe in a surface profilometry. The invention involves the use of one or more diffractive optical elements (11), including diffraction gratings and holograms, combined with conventional optical elements (5, 6, 14, 15), to form a plurality of light beams (2, 4, 12, 13), each with a selectable shape and intensity, from a single light source (1), reflect the beams off mechanical objects and process the reflected beams, all to the end of measuring the position of such objects with a high degree of precision. The invention may also be used to effect mechanical changes in such objects. Devices with these improvements have numerous applications, including molecular force measurements, atomic force microscopy and manipulation technology, lithographic manufacturing, nanometer scale surface profiling and other aspects of nanotechnology.

摘要翻译： 光学测量各种物体或物体阵列的位置或角度的装置和方法，包括扫描探针显微镜中的悬臂，微机械生物和化学传感器以及表面轮廓测量中的样品或探针。 本发明涉及使用一个或多个衍射光学元件，包括与常规光学元件组合的衍射光栅和全息图，以从单个光源形成每个具有可选形状和强度的多个光束，反射光束 关闭机械物体并处理反射光束，最终以高精度测量这些物体的位置。 本发明也可用于实现这些物体的机械变化。 具有这些改进的器件有许多应用，包括分子力测量，原子力显微镜和操作技术，平版印刷制造，纳米级表面分析和纳米技术的其他方面。