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公开(公告)号：EP2038087A2
公开(公告)日：2009-03-25
申请号：EP06839174.7
申请日：2006-12-06
发明人： PROKSCH, Roger
IPC分类号： B23Q17/09
摘要： An apparatus and technique for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work is described.
摘要翻译： 描述了用于提取原子力显微镜中的振荡悬臂或其他振荡传感器的较高本征模或谐波中携带的信息的装置和技术及相关的MEMs工作。
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公开(公告)号：EP1573299A2
公开(公告)日：2005-09-14
申请号：EP03813851.7
申请日：2003-12-18
发明人： PROKSCH, Roger,Asylum Research Corporation , CLEVELAND, Jason,Asylum Research Corporation , BOCEK, Dan,Asylum Research Corporation , DAY, Todd,Asylum Research Corporation , CALLAHAN, Clint,Asylum Research Corporation , VIANI, Mario, B.,Asylum Research Corporation
IPC分类号： G01N13/16
摘要： A controller for cantilever-based instruments, including atomic force microscopes, molecular force probe instruments, high-resolution profilometers and chemical or biological sensing probes. The controller samples the output of the photo-detector commonly used to detect cantilever deflection in these instruments with a very fast analog/digital converter (ADC). The resulting digitized representation of the output signal is then processed with field programmable gate arrays and digital signal processors without making use of analog electronics. Analog signal processing is inherently noisy while digital calculations are inherently "perfect" in that they do not add any random noise to the measured signal. Processing by field programmable gate arrays and digital signal processors maximizes the flexibility of the controller because it can be varied through programming means, without modification of the controller hardware.
摘要翻译： 基于悬臂的仪器的控制器，包括原子力显微镜，分子力探头仪器，高分辨率轮廓仪和化学或生物传感探头。 控制器通过一个非常快速的模拟/数字转换器（35）对通常用于检测这些仪器中的悬臂偏转的光电检测器的输出进行采样。 然后用现场可编程门阵列（31）和数字信号处理器（32）处理输出信号的数字化表示，而不使用模拟电子器件。
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公开(公告)号：EP1512095A2
公开(公告)日：2005-03-09
申请号：EP03755524.0
申请日：2003-05-27
发明人： BOCKER, Dan , PROKSCH, Roger
IPC分类号： G06F17/40
CPC分类号： G01D5/2291
摘要： Techniques for coupling with devices that convert displacements into differential voltages and improve the sensitivity of such devices. The disclosed system improves the accuracy and resolution of a transducers such as an LVDT by converting certain parts of the circuit to a digital circuit. One embodiment uses a processor 80, although other digital processing circuitry may also be used.
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4.发明公开IMPROVED LINEAR VARIABLE DIFFERENTIAL TRANSFORMERS FOR HIGH PRECISION POSITION MEASUREMENTS 审中-公开改进的线性差动变压器高精度位置测量
公开(公告)号：EP1340040A2
公开(公告)日：2003-09-03
申请号：EP01990186.7
申请日：2001-11-30
IPC分类号： G01B7/14
CPC分类号： G01Q10/04 , G01D5/2066 , G01D5/2291 , H01F21/04
摘要： A transducer that reduces noise, increases sensitivity, and improved the time response of a linear variable differential transformer (LVDT). The device replaces the primary coil and the high permeability ferromagnetic core of conventional LVDTs with a primary coil (15) wound around a moving non-ferromagnetic core (14). In addition to reducing or eliminating Barkhausen noise, this approach reduced or eliminated a number of other undesirable effects in conventional LVDTs including excessive eddy current heating in the core, non-linearities associated with high permeability materials and the length scale of the flux circuit. These improvements are coupled with improved LVDT signal conditioning circuitry. The device is also an actuator and may be used to convert differential voltages into force. Devices with these improvements have numerous applications, including molecular force measurements, atomic force microscopy and manipulation technology, lithographic manufacturing, nanometer scale surface profiling and other aspects of nanotechnology.
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公开(公告)号：EP1512095B1
公开(公告)日：2013-01-16
申请号：EP03755524.0
申请日：2003-05-27
发明人： BOCKER, Dan , PROKSCH, Roger
IPC分类号： G06F17/40
CPC分类号： G01D5/2291
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公开(公告)号：EP1428058A2
公开(公告)日：2004-06-16
申请号：EP02770433.7
申请日：2002-08-23
发明人： PROKSCH, Rogerc/o Asylum Research Corporation , CLEVELAND, Jasonc/o Asylum Research Corporation , BOCEK, Danc/o Asylum Research Corporation
IPC分类号： G02B7/04
CPC分类号： G01Q20/02 , G01Q70/06 , G02B26/0808
摘要： An apparatus and method for measuring optically the position or angle of a variety of objects or arrays of objects, including cantilevers in scanning probe microscopy, micromechanical biological and chemical sensors and the sample or a probe in a surface profilometry. The invention involves the use of one or more diffractive optical elements (11), including diffraction gratings and holograms, combined with conventional optical elements (5, 6, 14, 15), to form a plurality of light beams (2, 4, 12, 13), each with a selectable shape and intensity, from a single light source (1), reflect the beams off mechanical objects and process the reflected beams, all to the end of measuring the position of such objects with a high degree of precision. The invention may also be used to effect mechanical changes in such objects. Devices with these improvements have numerous applications, including molecular force measurements, atomic force microscopy and manipulation technology, lithographic manufacturing, nanometer scale surface profiling and other aspects of nanotechnology.
摘要翻译： 光学测量各种物体或物体阵列的位置或角度的装置和方法，包括扫描探针显微镜中的悬臂，微机械生物和化学传感器以及表面轮廓测量中的样品或探针。 本发明涉及使用一个或多个衍射光学元件，包括与常规光学元件组合的衍射光栅和全息图，以从单个光源形成每个具有可选形状和强度的多个光束，反射光束 关闭机械物体并处理反射光束，最终以高精度测量这些物体的位置。 本发明也可用于实现这些物体的机械变化。 具有这些改进的器件有许多应用，包括分子力测量，原子力显微镜和操作技术，平版印刷制造，纳米级表面分析和纳米技术的其他方面。
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公开(公告)号：EP1994360A1
公开(公告)日：2008-11-26
申请号：EP07852352.9
申请日：2007-03-13
IPC分类号： G01B5/28
CPC分类号： G01N3/317 , B82Y35/00 , G01N2203/0078 , G01Q60/366
摘要： A new type of indenter is described. This device combines certain sensing and structural elements of atomic force microscopy with a module designed for the use of indentation probes, conventional diamond and otherwise, as well as unconventional designs, to produce high resolution and otherwise superior indentation measurements.
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8.发明公开
公开(公告)号：EP1992004A2
公开(公告)日：2008-11-19
申请号：EP07757443.2
申请日：2007-02-23
发明人： PROKSCH, Roger
IPC分类号： H01J37/20
CPC分类号： F16F7/1011 , G01L5/0038 , G01L5/0061 , G01Q10/065 , G01Q70/04
摘要： A technique for actively damping internal vibrations in a scanning probe microscope is disclosed. The excitation of various mechanical movements, including resonances, in the mechanical assembly of an SPM can adversely effect its performance, especially for high speed applications. An actuator is used to compensate for the movements. The actuator may operate in only the z direction, or may operate in other directions. The actuator (s) may be located at positions of antinodes.
摘要翻译： 公开了一种用于在扫描探针显微镜中主动衰减内部振动的技术。 在SPM的机械组装中的各种机械运动（包括谐振）的激发可能不利地影响其性能，特别是对于高速应用。 执行器用于补偿运动。 致动器可以仅在z方向上操作，或者可以在其他方向上操作。 致动器可以位于波腹的位置。
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公开(公告)号：EP1989535A2
公开(公告)日：2008-11-12
申请号：EP06850413.3
申请日：2006-11-30
IPC分类号： G01N23/00
CPC分类号： G01Q10/06
摘要： Systems and techniques for varying a scan rate in a measurement instrument. The techniques may be used in scanning probe instruments, including atomic force microscopes (AFMs) and other scanning probe microscopes, as well as profilometers and confocal optical microscopes. This allows the selective imaging of particular regions of a sample surface for accurate measurement of critical dimensions within a relatively small data acquisition time.
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