公开(公告)号：EP1911095A2

公开(公告)日：2008-04-16

申请号：EP06786800.0

申请日：2006-07-10

申请人： Atmel Corporation

发明人： MILLER, Gayle, W., Jr. ,  DUDEK, Volker ,  GRAF, Michael

IPC分类号： H01L29/00

CPC分类号： H01L29/7824 ,  H01L21/823481 ,  H01L29/0653 ,  H01L29/0847 ,  H01L29/086 ,  H01L29/42368 ,  H01L29/66659 ,  H01L29/66689 ,  H01L29/7835

摘要： A method of fabricating an electronic device and the resulting electronic device. The method includes forming a gate oxide on an uppermost side of a silicon-on-insulator substrate; forming a first polysilicon layer over the gate oxide; and forming a first silicon dioxide layer over the first polysilicon layer. A first silicon nitride layer is then formed over the first silicon dioxide layer followed by a second silicon dioxide layer. Shallow trenches are etched through all preceding dielectric layers and into the SOI substrate. The etched trenches are filled with another dielectric layer (e.g., silicon dioxide) and planarized. Each of the preceding dielectric layers are removed, leaving an uppermost sidewall area of the dielectric layer exposed for contact with a later-applied polysilicon gate area. Formation of the sidewall area assures a full-field oxide thickness thereby producing a device with a reduced-electric field and a reduced capacitance between gate and drift regions.