公开(公告)号：EP3137847A1

公开(公告)日：2017-03-08

申请号：EP15721571.6

申请日：2015-04-29

申请人： Attocube Systems AG

发明人： ZECH, Martin ,  THURNER, Klaus

IPC分类号： G01B21/16 ,  G01B9/02 ,  G01B11/06

CPC分类号： G01B11/14 ,  G01B9/02015 ,  G01B9/0205 ,  G03F7/70775

摘要： The invention relates to an interferometer (10) for real-time measurement of absolute distances and/or relative position movements between a first and a second machine part, comprising a measurement unit (20) and a reflector unit (40). The measurement unit (20) comprises a housing (21) having at least one wall that consists of a heat-conducting material, a plurality of measurement elements being arranged inside the housing (21). Said measurement elements comprise: a laser source (22), a Peltier element (24) and a digital control (23), and are thermally coupled to the wall of the housing (21) that consists of a heat-conducting material.

摘要翻译： 其中所述测量元件热耦合到由导热材料制成的所述壳体（21）的壁。