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公开(公告)号：EP3980578A1
公开(公告)日：2022-04-13
申请号：EP20727329.3
申请日：2020-05-27
申请人： BASF SE , Wayne State University
发明人： KLENK, Sinja Verena , SCHWEINFURTH, David Dominique , MAYR, Lukas , WEIGUNY, Sabine , WINTER, Charles , WEERATHUNGA SIRIKKATHUGE, Nilanka
IPC分类号： C23C16/455 , C07F5/06
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公开(公告)号：EP3980577A1
公开(公告)日：2022-04-13
申请号：EP20727328.5
申请日：2020-05-27
申请人： BASF SE , Wayne State University
发明人： KLENK, Sinja Verena , SCHWEINFURTH, David Dominique , MAYR, Lukas , WEIGUNY, Sabine , WINTER, Charles , WEERATHUNGA SIRIKKATHUGE, Nilanka , KARUNARATNE, Tharindu
IPC分类号： C23C16/455 , C07F5/06
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公开(公告)号：EP3366808A1
公开(公告)日：2018-08-29
申请号：EP18158881.5
申请日：2014-06-27
CPC分类号： C23C16/18 , C23C16/45534 , C23C16/45553
摘要： A method of forming a layer on a substrate and a compound. The compound hasan atom in an oxidized state is reacted with a bis(trimethylsilyl) six-membered ring system or related compound to form a second compound having the atom in a reduced state relative to the first compound. The atom in an oxidized state is selected from the group consisting of Groups 2-12 of the Periodic Table, the lanthanides, As, Sb, Bi, Te, Si, Ge, Sn, and Al.
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4.发明公开BIS(TRIMETHYLSILYL) SIX-MEMBERED RING SYSTEMS AND RELATED COMPOUNDS AS REDUCING AGENTS FOR FORMING LAYERS ON A SUBSTRATE 有权六元双（三甲基硅烷基）环体系和连接，作为还原剂电影的制作ON A SUBSTRATE
公开(公告)号：EP3013997A1
公开(公告)日：2016-05-04
申请号：EP14817237.2
申请日：2014-06-27
CPC分类号： C23C16/18 , C23C16/45534 , C23C16/45553
摘要： A first compound having an atom in an oxidized state is reacted with a bis(trimethylsilyl) six-membered ring system or related compound to form a second compound having the atom in a reduced state relative to the first compound. The atom in an oxidized state is selected from the group consisting of Groups 2-12 of the Periodic Table, the lanthanides, As, Sb, Bi, Te, Si, Ge, Sn, and Al.
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5.发明授权BIS(TRIMETHYLSILYL) SIX-MEMBERED RING SYSTEMS AND RELATED COMPOUNDS AS REDUCING AGENTS FOR FORMING LAYERS ON A SUBSTRATE 有权BIS（三甲基甲硅烷基）六元环体系和作为还原剂在基材上形成层的相关化合物
公开(公告)号：EP3013997B1
公开(公告)日：2018-05-02
申请号：EP14817237.2
申请日：2014-06-27
CPC分类号： C23C16/18 , C23C16/45534 , C23C16/45553
摘要： A first compound having an atom in an oxidized state is reacted with a bis(trimethylsilyl) six-membered ring system or related compound to form a second compound having the atom in a reduced state relative to the first compound. The atom in an oxidized state is selected from the group consisting of Groups 2-12 of the Periodic Table, the lanthanides, As, Sb, Bi, Te, Si, Ge, Sn, and Al.
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