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1.发明授权ELECTROSTATIC DEPOSITION OF PARTICLES GENERATED FROM RAPID EXPANSION OF SUPERCRITICAL FLUID SOLUTIONS 有权BY弛豫临界溶液的快速电选（RESS）GOT粒子
公开(公告)号：EP1507600B1
公开(公告)日：2010-03-17
申请号：EP03728972.5
申请日：2003-05-14
发明人： FULTON, John, L. , DEVERMAN, George
IPC分类号： B05D1/02
CPC分类号： C08J9/0004 , B05D1/025 , B05D1/04 , C08J2300/14 , H01L51/0003 , H01L51/005 , Y02P20/544
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2.发明公开ELECTROSTATIC DEPOSITION OF PARTICLES GENERATED FROM RAPID EXPANSION OF SUPERCRITICAL FLUID SOLUTIONS 有权BY弛豫临界溶液的快速电选（RESS）GOT粒子
公开(公告)号：EP1507600A1
公开(公告)日：2005-02-23
申请号：EP03728972.5
申请日：2003-05-14
发明人： FULTON, John, L. , DEVERMAN, George
IPC分类号： B05D1/02
CPC分类号： C08J9/0004 , B05D1/025 , B05D1/04 , C08J2300/14 , H01L51/0003 , H01L51/005 , Y02P20/544
摘要： A method for depositing a substance on a substrate that involves forming a supercritical fluid solution of at least one supercritical fluid solvent and at least one solute, discharging the supercritical fluid solution through an orifice (10) under conditions sufficient to form solid particles of the solute that are substantially free of the supercritical fluid solvent, and electrostatically depositing the solid solute particles onto the substrate (13) . The solid solute particles may be charged to a first electric potential and then deposited onto the substrate (13) to form a film. The solute particles may have a mean particle size of less than 1 micron.
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