-
公开(公告)号:EP2553139B1
公开(公告)日:2017-09-13
申请号:EP11708361.8
申请日:2011-02-23
发明人: HELLER, Christian, Maria Anton , DUGGAL, Anil, Raj , COYLE, Dennis, Joseph , YAN, Min , ERLAT, Ahmet, Gun , ZHAO, Ri-an
IPC分类号: C23C16/40 , C23C16/455 , C23C16/04 , C23C26/00
CPC分类号: C23C16/403 , C23C16/045 , C23C16/402 , C23C16/45525 , C23C26/00