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公开(公告)号:EP2553139B1
公开(公告)日:2017-09-13
申请号:EP11708361.8
申请日:2011-02-23
发明人: HELLER, Christian, Maria Anton , DUGGAL, Anil, Raj , COYLE, Dennis, Joseph , YAN, Min , ERLAT, Ahmet, Gun , ZHAO, Ri-an
IPC分类号: C23C16/40 , C23C16/455 , C23C16/04 , C23C26/00
CPC分类号: C23C16/403 , C23C16/045 , C23C16/402 , C23C16/45525 , C23C26/00
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公开(公告)号:EP2553745B1
公开(公告)日:2019-11-27
申请号:EP11709846.7
申请日:2011-03-12
发明人: YAN, Min , RAKUFF, Stefan , SHI, Xiaolei , ZHAO, Ri-An
IPC分类号: H01L51/52
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公开(公告)号:EP1859496B1
公开(公告)日:2018-09-12
申请号:EP05858693.4
申请日:2005-11-15
发明人: KIM, Tae, Won , YAN, Min , HELLER, Christian, Maria, Anton , SCHAEPKENS, Marc , GORCZYCA, Thomas, Bert , MCCONNELEE, Paul, Alan , ERLAT, Ahmet, Gun
IPC分类号: H01L51/52
CPC分类号: H01L51/5256
摘要: A composite article with at least one high integrity protective coating, the high integrity protective coating having at least one planarizing layer and at least one organic-inorganic composition barrier coating layer. A method for depositing a high integrity protective coating.
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