公开(公告)号：EP3295476A1

公开(公告)日：2018-03-21

申请号：EP16721171

申请日：2016-05-09

申请人： BOSCH GMBH ROBERT

发明人： DIETZ FRANZ ,  SCHNEIDER DANIEL

IPC分类号： H01L21/66 ,  H01L23/58

CPC分类号： H01L22/34 ,  H01L23/585

摘要： The invention relates to a detector (100) for determining a faulty semiconductor component (101), comprising a semiconductor component (101), a contact-via-chain (102) which is arranged laterally at a distance to the semiconductor component (101) and surrounds the semiconductor component (101) in some regions, a guard ring (103) which is arranged laterally at a distance to the semiconductor component (101), and an evaluation unit (104) which is arranged on the semiconductor component (101), characterised in that the evaluation unit (104) is configured to apply an electrical voltage to the contact-via-chain (102), in particular a permanent electrical voltage, to determine a resistance value of the contact-via-chain (102) and to generate an output signal, if the resistance value of the contact-via-chain (102) exceeds a threshold value.