专利检索 ap:("BROOKS AUTOMATION, INC.") AND inv:"WILLIAM, Fosnight" 第 1 页

1.

发明公开
ELEVATOR-BASED TOOL LOADING AND BUFFERING SYSTEM 有权
标题翻译： WERKZEUGLADE-和缓冲来升降台

公开(公告)号：EP1803151A2

公开(公告)日：2007-07-04

申请号：EP05789226.7

申请日：2005-08-23

申请人： BROOKS AUTOMATION, INC.

发明人： ULYSSES, Gilchrist , BUFANO, Michael, L. , WILLIAM, Fosnight , HOFMEISTER, Christopher , FRIEDMAN, Gerald, M.

IPC分类号： H01L21/673

CPC分类号： H01L21/677 , B65G47/50 , H01L21/67276 , H01L21/67769 , H01L21/67772 , H01L21/67775 , Y10S414/14

摘要： A substrate processing apparatus (10) is provided. The apparatus has a casing, a load port interface (I) and a carrier holding station (16) The casing has processing devices (12) within for processing substrates. The load port interface (I) is connected to the casing for loading substrates into the processing device (12). The carrier holding station (16) is connected to the casing. The carrier holding statio (16) is adapted for holding at least one substrate transport carrier (C) at the load port interface (I). The carrier holding station (16) is arranged to provide a fast swap section for replacement of the substrate transport carrier (C) from the carrier holding station (16).