CONTACTLESS CARRIER DEVICE AND CONTACTLESS CARRIER SYSTEM

    公开(公告)号:EP3403954A1

    公开(公告)日:2018-11-21

    申请号:EP17738515.0

    申请日:2017-01-13

    IPC分类号: B65G49/07 H01L21/677

    CPC分类号: B65G49/07 H01L21/677

    摘要: This invention is to provide a noncontact conveying apparatus and a noncontact conveying system, which can move an object from a conveying path to a predetermined position without using another device, and can convey the object in a noncontact manner without causing the object to fall down even if the conveying path is inclined or faces downwardly. The system includes a holding device 11 for holding an object 1 in a noncontact manner and a moving device 10 for moving the holding device 11. The holding device 11 includes a levitating device 7 for levitating the object 1 and an attracting device for attracting the object. The levitating device 7 includes a conveying plate 2 made of a porous material having a large number of pores, a compressor 6 for sending gas to the pores of the conveying plate and ejecting the gas from the pores towards the object. The moving device 10 is constituted by the magnetic material 8 and the magnet 9 for moving the object in a noncontact manner while attracting the object towards the conveying plate.

    COMPACT MANUFACTURING DEVICE, AND INTER-DEVICE TRANSPORT SYSTEM FOR PRODUCTION LINE

    公开(公告)号:EP3229267A4

    公开(公告)日:2018-07-18

    申请号:EP15864366

    申请日:2015-12-01

    申请人: AIST

    IPC分类号: H01L21/677

    摘要: [Problem to be Solved] To automatically transport a wafer transport container between compact manufacturing devices in a production line made up of a plurality of compact manufacturing devices such as semiconductor manufacturing devices. [Solution] The production line 1 is formed by arranging three compact semiconductor manufacturing devices 2 in parallel in a straight line on a floor surface 16. The semiconductor manufacturing devices 2 each have a substantially rectangular parallelepiped housing 3, and a processing chamber 5 and a device front chamber 6 are arranged inside each housing 3. Recesses 7 are formed above the device front chambers 6 in the front portions of the housings 3. Container mounting tables 9 and temporary placement trays 8 are installed in the recesses 7, and container transport means 12 are integrally provided. This makes it possible to automatically transport a wafer transport container 10 between the three semiconductor manufacturing devices 2. As a result, it is possible to efficiently advance a series of manufacturing processes for a semiconductor wafer.

    PLANT AND SYSTEM FOR THE AUTOMATIC HORIZONTAL ASSEMBLY OF PHOTOVOLTAIC PANELS WITH FRONT-BACK CONNECTION OF THE CELLS AND PRE-FIXING
    5.
    发明公开
    PLANT AND SYSTEM FOR THE AUTOMATIC HORIZONTAL ASSEMBLY OF PHOTOVOLTAIC PANELS WITH FRONT-BACK CONNECTION OF THE CELLS AND PRE-FIXING 有权
    空调和系统的光伏模块的自动,水平安装,前后连接和预装配

    公开(公告)号:EP2958155A1

    公开(公告)日:2015-12-23

    申请号:EP15001825.7

    申请日:2015-06-19

    申请人: Vismunda S.r.l.

    发明人: SPOTTI, Davide

    IPC分类号: H01L31/18

    摘要: Plant (10) and system for the automatic horizontal assembly of photovoltaic panels (30) with front-back-contact solar cells (300-1) of crystalline silicon, of the type called H-type, the contacting being carried out at a temperature lower than 150°C also with the prefixing of conductive elements onto the encapsulating layer; the present invention solves the main problems of the conventional stringing systems and provides high production capacity with a precise positioning of the components. The plant (10) is made up of single workstations (100A-I) of the modular type which are arranged sequentially in a linear series, individually equipped according to the specific working process, being adjacent and laterally open to be crossed by the conveying line (110) of the trays (109) containing the panels being worked; after the automatic assembly in said plant (10), the panels are ready to be rolled in conventional furnaces.

    摘要翻译: 设备(10)和系统,用于光伏面板的与前后接触太阳能电池的晶体硅的自动水平组件(30)(300-1),被称为H型的类型中,接触被在的温度下进行 低于150℃,因此与向所包封层导电元件的前缀; 本发明解决了以往的穿线系统的主要问题,并提供与该部件的精确定位的高生产能力。 该工厂(10)是由哪个顺序布置在直线系列,独立配备雅鼎的具体工作过程,是相邻的和尾盘反弹开放的模块化类型的单工作站(100A-I)的由传输线划线 含被加工板的托盘(109)的(110); 自动装配在所述植物(10)之后,面板准备在常规炉待轧制。

    Anneal module for semiconductor wafers
    6.
    发明公开
    Anneal module for semiconductor wafers 审中-公开
    退火模具

    公开(公告)号:EP2849217A1

    公开(公告)日:2015-03-18

    申请号:EP14183931.6

    申请日:2014-09-08

    IPC分类号: H01L21/67 H01L21/677

    摘要: An anneal module for annealing semiconductor material wafers and similar substrates reduces particle contamination and oxygen ingress while providing uniform heating including for 500°C processes. The anneal module may include a process chamber formed in a metal body having internal cooling lines. A hot plate has a pedestal supported on a thermal choke on the body. A gas distributor in the lid over the hot plate flows gas uniformly over the wafer. A transfer mechanism moves a hoop to shift the wafer between the hot plate and a cold plate.

    摘要翻译: 用于退火半导体材料晶片和类似衬底的退火模块可减少颗粒污染和氧气进入,同时提供包括500℃工艺在内的均匀加热。 退火模块可以包括形成在具有内部冷却线的金属体中的处理室。 热板具有支撑在身体上的热扼流圈上的基座。 热板上的盖子中的气体分配器将气体均匀地流过晶片。 传送机构移动环以在热板和冷板之间移动晶片。

    PITCH CHANGE DEVICE AND PITCH CHANGE METHOD
    7.
    发明公开
    PITCH CHANGE DEVICE AND PITCH CHANGE METHOD 审中-公开
    TONHÖHENÄNDERUNGSVORRICHTUNGUNDTONHÖHENÄNDERUNGSVERFAHREN

    公开(公告)号:EP2584597A1

    公开(公告)日:2013-04-24

    申请号:EP11795769.6

    申请日:2011-06-15

    IPC分类号: H01L21/677

    摘要: A pitch conversion device and pitch conversion method is directed to convert the pit of a plurality of partition members (90) arranged parallel to each other along The X-direction and include a plurality of entry members (11) arranged parallel to each other in The X-direction and configured to enter between neighboring partition members (90), and a pushing member (31) to push the plurality of entry members (11) in turn and allow them to enter neighboring partition members (90) associated while moving in the X direction. The entry members (11) are biased in a exiting direction from between the neighboring partition members (90).

    摘要翻译: 音调转换装置和音调转换方法旨在将沿着X方向彼此平行布置的多个分隔构件(90)的凹坑转换成包括彼此平行布置的多个入口构件(11) X方向并且被配置为进入相邻的分隔构件(90)之间并且推动构件(31)依次推动所述多个入口构件(11)并允许它们进入相邻的分隔构件(90),同时在 X方向。 进入构件(11)在相邻的分隔构件(90)之间沿着离开的方向偏置。

    SUBSTRATE PROCESSING APPARATUS
    8.
    发明公开
    SUBSTRATE PROCESSING APPARATUS 有权
    基片处理设备

    公开(公告)号:EP1805792A1

    公开(公告)日:2007-07-11

    申请号:EP05807523.5

    申请日:2005-10-11

    IPC分类号: H01L21/677

    摘要: A substrate processing apparatus including a transport chamber having an end and defining more than one substantially linear substrate transport zone where each transport zone extends longitudinally along the transport chamber between opposing walls of the transport chamber and at least one of the more than one substantially linear substrate transport zones is configured as a supply zone for enabling transport of substrates from the end and at least one of the more than one substantially linear substrate transport zones is configured as a return zone for enabling transport of substrates to the end, and at least one substrate transport located in and movably mounted to the transport chamber for transporting substrates along the more than one substantially linear substrate transport zone, where each substrate transport zone is configured to allow the at least one substrate transport to move from one transport zone to another transport zone.

    LATERAL TRANSFER DEVICE, AIR TRANSPORT APPARATUS, AND AUTOMATIC MATERIAL HANDLING SYSTEM

    公开(公告)号:EP4411793A1

    公开(公告)日:2024-08-07

    申请号:EP22875188.9

    申请日:2022-09-30

    发明人: DU, Baobao MIAO, Feng

    摘要: A transversing loading device, an overhead hoist vehicle, and an automatic material handling system applied in the technical field of automatic control are provided according to the present application. The transversing loading device includes a picking-up and fixing mechanism fixedly connected to the travelling base plate (6) of the overhead hoist vehicle, and a horizontal adjusting mechanism installed on a lower surface of the picking-up and fixing mechanism. The horizontal adjusting mechanism includes a synchronous adjusting mechanism and a sliding mechanism, the synchronous adjusting mechanism is arranged on a side surface of the sliding mechanism and is configured to slidably adjust the sliding mechanism to a predetermined horizontal position relative to the travelling base plate (6) along a first direction. The first direction is a horizontal direction perpendicular to the side surface, and the predetermined horizontal position is a position above a target object to be handled. With the horizontal adjusting mechanism, the components in the overhead hoist vehicle can be quickly and accurately adjusted to a position directly above the target object to be handled, which can improve the production efficiency of the product and better meet the needs of the factory.