公开(公告)号：EP4199039A1

公开(公告)日：2023-06-21

申请号：EP21855345.1

申请日：2021-07-26

申请人： Beijing NAURA Microelectronics Equipment Co., Ltd.

发明人： WU, Fangna ,  SHI, Sixue

IPC分类号： H01L21/02 ,  H01L21/67

摘要： The present disclosure provides a processing task start method and device in a semiconductor processing apparatus. The method includes generating a processing area relationship list of a current processing task of the semiconductor processing apparatus; determining all to-be-started processing tasks and generating a processing area relationship list for each of the to-be-started processing tasks, based on the processing area relationship list of the current processing task and the processing area relationship list of each of the to-be-started processing task, determining whether all the to-be-started processing tasks include a startable processing task according to a first predetermined rule, when all the to-be-started processing tasks include a startable processing task, selecting a target startable processing task from all startable processing tasks according to a second predetermined rule, and starting the target startable processing task. Therefore, at any time, specified materials of the target startable processing task and the current processing task will not appear in the two same processing areas and in the opposite sequence to avoid deadlock and improve production efficiency.