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公开(公告)号:EP1440732B1
公开(公告)日:2010-07-07
申请号:EP04001179.3
申请日:2004-01-21
CPC分类号: B01L3/502738 , B01L3/5027 , B01L3/502784 , B01L2200/0605 , B01L2300/0861 , B01L2400/0406 , B01L2400/0487 , B01L2400/0688 , G01F11/28 , Y10T436/25375 , Y10T436/2575
公开(公告)号:EP1440732B1
公开(公告)日:2010-07-07
申请号:EP04001179.3
申请日:2004-01-21
CPC分类号: B01L3/502738 , B01L3/5027 , B01L3/502784 , B01L2200/0605 , B01L2300/0861 , B01L2400/0406 , B01L2400/0487 , B01L2400/0688 , G01F11/28 , Y10T436/25375 , Y10T436/2575