专利检索 ap:("Brooks Automation US, LLC") AND inv:"TSANG, Vincent" 第 1 页

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发明公开
SUBSTRATE PROCESSING APPARATUS 审中-实审

公开(公告)号：EP4423801A1

公开(公告)日：2024-09-04

申请号：EP22888536.4

申请日：2022-10-28

申请人： Brooks Automation US, LLC

发明人： MOURA, Jairo , TSANG, Vincent , SAINI, Karanjit , CAVENEY, Robert, T. , MAY, Robert, C. , BABBS, Daniel

IPC分类号： H01L21/67 , B65G54/02 , G05D3/12

CPC分类号： H01L21/67173 , H01L21/67196 , H01L21/67742 , H01L21/67161 , H01L21/67709 , H01L21/67727 , H01L21/67715 , H01L21/68707