公开(公告)号：EP0977242A2

公开(公告)日：2000-02-02

申请号：EP99305837.9

申请日：1999-07-23

申请人： CANON KABUSHIKI KAISHA

发明人： Yanagita, Kazutaka, c/o Canon Kabushiki Kaisha ,  Yonehara, Takao, c/o Canon Kabushiki Kaisha ,  Omi, Kazuaki, c/o Canon Kabushiki Kaisha ,  Sakaguchi,Kiyofumi, c/o Canon Kabushiki Kaisha

IPC分类号： H01L21/00

CPC分类号： H01L21/67092 ,  Y10S156/942 ,  Y10T29/49821 ,  Y10T83/364 ,  Y10T156/1121 ,  Y10T156/1126 ,  Y10T156/1374 ,  Y10T156/1922 ,  Y10T156/1939 ,  Y10T156/1978

摘要： This invention prevents defects generated when a bonded substrate stack having a separation layer is separated. A bonded substrate stack (101) having a porous layer (101b) is separated in two steps of the first and second processes. In the first process, a jet is ejected to the porous layer (101b) while rotating the bonded substrate stack (101) to partially separate the bonded substrate stack (101) while leaving the central portion of the porous layer (101b) as an unseparated region. In the second process, the jet is ejected to the porous layer (101b) while rotation of the bonded substrate stack (101) is stopped. A force is applied to the unseparated region from a predetermined direction to completely separate the bonded substrate stack (101). Also, the first region (peripheral portion) and second region (central portion) of the bonded substrate stack (101) having the porous layer (101b) are separated using a jet and ultrasonic wave, respectively. More specifically, the first region is separated by a jet ejected from a nozzle (102) while rotating the bonded substrate stack (101). On the other hand, the second region is separated by an ultrasonic wave generated by an ultrasonic vibrator (1203).

摘要翻译： 本发明可防止当具有分离层的键合衬底叠层分离时产生的缺陷。 具有多孔层（101b）的键合衬底叠层（101）在第一和第二工序的两个步骤中分离。 在第一种方法中，在旋转键合衬底叠层（101）以使多孔层（101b）的中心部分留下未分离的部分地分离键合衬底叠层（101）的同时，喷射到多孔层（101b） 地区。 在第二过程中，在停止键合衬底叠层（101）的旋转的同时，将射流喷射到多孔层（101b）。 从预定方向向未分离区域施加力，以完全分离键合衬底叠层（101）。 此外，分别使用喷射和超声波分离具有多孔层（101b）的键合衬底叠层（101）的第一区域（周边部分）和第二区域（中心部分）。 更具体地说，在旋转键合衬底叠层（101）的同时，通过从喷嘴（102）喷射的射流分离第一区域。 另一方面，第二区域由超声波振子（1203）产生的超声波分离。

公开(公告)号：EP0948032A2

公开(公告)日：1999-10-06

申请号：EP99302393.6

申请日：1999-03-29

申请人： CANON KABUSHIKI KAISHA

发明人： Sakaguchi, Kiyofumi, c/o Canon Kabushiki Kaisha ,  Omi, Kazuaki, c/o Canon Kabushiki Kaisha ,  Miyakogawa, Toshikazu, c/o Canon Kabushiki Kaisha ,  Yonehara, Takao, c/o Canon Kabushiki Kaisha ,  Yanagita, Kazutaka, c/o Canon Kabushiki Kaisha

IPC分类号： H01L21/00

CPC分类号： H01L21/67092 ,  H01L21/76259 ,  Y10T83/364 ,  Y10T156/1374 ,  Y10T156/17 ,  Y10T156/1922 ,  Y10T156/1928

摘要： This invention is to prevent a substrate from dropping when it is transferred/received to/from a separating apparatus. The support surfaces of substrate holding portions (22, 23) are made horizontal, and a substrate (21) to be separated is mounted on one substrate holding portion (22) in a horizontal state (2A). The substrate holding portions (22, 23) are pivoted about rotary shafts (26, 27), respectively, to make the support surfaces of the substrate holding portions (22, 23) vertical so that the substrate (21) is sandwiched by the substrate holding portions (22, 23) (2B). The substrate holding portions (22, 23) are rotated about rotary shafts (24, 25), respectively, and simultaneously, high-pressure, high-speed water is ejected from an ejection nozzle (28) to separate the substrate (21) into two substrates (21a, 21c). The substrate holding portions (22, 23) are pivoted about the rotary shafts (26, 27), respectively, to make the support surfaces horizontal (2C). With this arrangement, the substrate can be supported from the lower side and transferred in the horizontal state.

摘要翻译： 本发明是为了防止当基板从分离装置传送/接收时掉落。 衬底保持部分（22,23）的支撑表面是水平的，并且待分离的衬底（21）以水平状态（2A）安装在一个衬底保持部分（22）上。 基板保持部分（22,23）分别围绕旋转轴（26,27）枢转，以使基板保持部分（22,23）的支撑表面垂直，使得基板（21）被基板 保持部（22,23）（2B）。 基板保持部分（22,23）分别围绕旋转轴（24,25）旋转，并且同时从喷嘴（28）喷出高压高速水以将基板（21）分离成 两个基板（21a，21c）。 基板保持部分（22,23）分别围绕旋转轴（26,27）枢转，以使支撑表面水平（2C）。 通过这种布置，基板可以从下侧被支撑并且以水平状态传送。