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    Mold for forming a microlens and method of fabricating the same
    2.
    发明公开
    Mold for forming a microlens and method of fabricating the same 有权
    Verfahren zur Herstellung einer GiessformfürMikro-Linsen

    公开(公告)号：EP0976530A2

    公开(公告)日：2000-02-02

    申请号：EP99114793.5

    申请日：1999-07-28

    申请人： CANON KABUSHIKI KAISHA

    发明人： Yagi, Takayuki, c/o Canon Kabushiki Kaisha ,  Shimada, Yasuhiro, c/o Canon Kabushiki Kaisha ,  Teshima, Takayuki, c/o Canon Kabushiki Kaisha ,  Ushijima, Takashi, c/o Canon Kabushiki Kaisha

    IPC分类号： B29D11/00 ,  B29C33/00

    CPC分类号： B29C33/42 ,  B29C33/3842 ,  B29D11/00365 ,  Y10S425/808

    摘要： A mold for a microlens includes a substrate (1, 11, 31, 51, 61) at least a portion of which is electrically conductive, such as an electrically-conductive substrate or a substrate with an electrode layer (2, 12, 32, 52), an insulating mask layer (3, 13, 33, 53) formed on the substrate and including an opening or plural openings (4, 14, 34, 54), and a plated layer (5, 15, 35, 55) electroplated in the opening and on the mask layer. A first condition that a diameter or width (⌀) of the opening (4, 14, 34, 54) has a relation of ⌀ ≦ 0.35R, wherein (R) is a radius of curvature of the plated layer (5, 15, 35, 55) right above the opening, or a second condition that the diameter or width (∅) of the opening (4, 14, 34, 54) is ⌀ ≦ 10 µ m, is met.

    摘要翻译： 用于微透镜的模具包括其至少一部分是导电的衬底（1,11,31,51,61），例如导电衬底或具有电极层的衬底（2,12,32,31， 52），形成在基板上并包括开口或多个开口（4,14,34,54）的绝缘掩模层（3,13,33,53）和镀层（5,15,35,55） 电镀在开口和掩模层上。 开口（4,14,34,54）的直径或宽度（DIAMETER）具有DIAMETER的关系的第一条件是其中（R）是镀层（5）的曲率半径， 15,35,55），或满足开口（4,14,34,54）的直径或宽度（0）为DIAMETER≤10μm的第二条件。