Angular velocity sensor and camera including the same
    5.
    发明公开
    Angular velocity sensor and camera including the same 失效
    角速度传感器和包括它的相机

    公开(公告)号:EP0572976A1

    公开(公告)日:1993-12-08

    申请号:EP93108798.5

    申请日:1993-06-01

    IPC分类号: G01C19/56 H04N5/232

    摘要: In an angular velocity sensor, there are provided a flat substrate (101) having a flat surface, a movable portion (102) provided to a portion of the substrate and adapted to be vibrated in a direction (A) perpendicular to the substrate surface, a first weight portion (103) provided to one portion of the movable portion (102), second weight portion (203) provided to another portion of the movable portion (102), first and second beam portions (104,204) extending in first and second directions which are different from each other in the substrate surface and supporting the first and second weight portions (103,203), respectively. The movable portion (102) is vibrated in the direction (A) perpendicular to the substrate surface. Deformations of the first and second beam portions (104,204) generated upon reception of Coriolis' forces when the substrate (101) is rotated about the first and second directions as rotational axes (113,114) are detected. Angular velocities of rotations about the first and second directions as the rotational axes (113,114) are detected on the basis of the deformations of the first and second beam portions (104,204).

    摘要翻译: 在角速度传感器中,提供了具有平坦表面的平坦基板(101),设置于基板的一部分并且适于在垂直于基板表面的方向(A)上振动的可移动部分(102) 第一重量部分(103),其设置于所述可动部分(102)的一部分;第二重量部分(203),其设置于所述可动部分(102)的另一部分;第一和第二梁部分(104,204),其以第一和第二 在衬底表面中彼此不同的方向,并分别支撑第一和第二重量部(103,203)。 可动部分102在垂直于基板表面的方向(A)上振动。 在检测到衬底(101)围绕作为旋转轴(113,114)的第一和第二方向旋转时接收到科里奥利力时产生的第一和第二梁部分(104,204)的变形。 基于第一和第二梁部分(104,204)的变形来检测作为旋转轴线(113,114)围绕第一和第二方向的旋转角速度。