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公开(公告)号：EP0764261A1
公开(公告)日：1997-03-26
申请号：EP96914884.0
申请日：1996-04-04
申请人： CARL ZEISS JENA GmbH
摘要： Disclosed is an instrument for determining the topography of a surface, the instrument including an oscillating scanner (2) comprising a piezo-electric resonator with a micro-scanning tip (25). The instrument also includes a piezo-electric actuator (1) for controlling the distance between the resonator tip (25) and the surface of the sample (5). In addition, it has a first device for measuring the tunnel current between the resonator tip (25) and the surface of the sample (5) and controlling, as a function of this current, the piezo-electric actuator (1). Also fitted is a second device for measuring the resonance behaviour of the piezo-electric resonator and for controlling the piezo-electric actuator (1) as a function of changes in the oscillation amplitudes, resonance frequencies or phase shifts which occur, a third device for measuring the harmonic component of the tunnel current, and a switch (13) by means of which the first, second or third device can be connected to the piezo-electric actuator (1).
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公开(公告)号：EP0764261B1
公开(公告)日：2001-07-11
申请号：EP96914884.0
申请日：1996-04-04
申请人： CARL ZEISS JENA GmbH
摘要： Disclosed is an instrument for determining the topography of a surface, the instrument including an oscillating scanner (2) comprising a piezo-electric resonator with a micro-scanning tip (25). The instrument also includes a piezo-electric actuator (1) for controlling the distance between the resonator tip (25) and the surface of the sample (5). In addition, it has a first device for measuring the tunnel current between the resonator tip (25) and the surface of the sample (5) and controlling, as a function of this current, the piezo-electric actuator (1). Also fitted is a second device for measuring the resonance behaviour of the piezo-electric resonator and for controlling the piezo-electric actuator (1) as a function of changes in the oscillation amplitudes, resonance frequencies or phase shifts which occur, a third device for measuring the harmonic component of the tunnel current, and a switch (13) by means of which the first, second or third device can be connected to the piezo-electric actuator (1).
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