MEMBRANE PROBING SYSTEM
    2.
    发明公开
    MEMBRANE PROBING SYSTEM 审中-公开
    干簧管传感器系统

    公开(公告)号:EP1210208A4

    公开(公告)日:2005-07-06

    申请号:EP99937404

    申请日:1999-07-21

    摘要: A substrate (200), preferably constructed of a ductile material and a tool (210) having the desired shape of the resulting device for contacting contact pads on a test device is brought into contact with the substrate. The tool is preferably constructed of a material that is harder than the substrate so that a depression (216) can be readily made therein. A dielectric (insulative) layer, that is preferably patterned, is supported by the substrate. A conductive material is located within the depressions and then preferably lapped to remove excess from the top surface of the dielectric layer and to provide a flat overall surface. A trace is patterned on the dielectric layer and the conductive material. A polyimide layer is then preferably patterned over the entire surface. The substrate is then removed by any suitable process.