公开(公告)号：EP0883698B1

公开(公告)日：2000-01-12

申请号：EP97907127.1

申请日：1997-02-25

申请人： CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS)

发明人： MADAR, Roland ,  ROUAULT, Alain ,  BLANQUET, Elisabeth ,  BERNARD, Claude ,  DUTRON, Anne-Marie

IPC分类号： C23C16/34 ,  C23C16/44

CPC分类号： C23C16/4488 ,  C23C16/34

摘要： A method for forming a Ti1-xAlxN coating on a part, wherein a chemical vapour deposition chamber is heated to 250-500 DEG C; the part to be coated is heated to 550-650 DEG C and placed in said chamber; and a mixture of titanium and aluminium chlorides, NH3 and H2 is injected into the chamber. The molar amount of NH3 is greater than the molar amount of chlorides, and the molar amount of hydrogen is over five times greater than the molar amount of chlorides.

公开(公告)号：EP0883698A1

公开(公告)日：1998-12-16

申请号：EP97907127.0

申请日：1997-02-25

申请人： CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS)

发明人： MADAR, Roland ,  ROUAULT, Alain ,  BLANQUET, Elisabeth ,  BERNARD, Claude ,  DUTRON, Anne-Marie

IPC分类号： C23C16

CPC分类号： C23C16/4488 ,  C23C16/34

摘要： A method for forming a Ti1-xAlxN coating on a part, wherein a chemical vapour deposition chamber is heated to 250-500 °C; the part to be coated is heated to 550-650 °C and placed in said chamber; and a mixture of titanium and aluminium chlorides, NH3 and H2 is injected into the chamber. The molar amount of NH3 is greater than the molar amount of chlorides, and the molar amount of hydrogen is over five times greater than the molar amount of chlorides.