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公开(公告)号:EP1535307B1
公开(公告)日:2013-06-19
申请号:EP03761657.0
申请日:2003-06-27
发明人: CACHONCINLLE, Christophe , DUSSART, Rémi , FLEURIER, Claude , POUVESLE, Jean-Michel , ROBERT, Eric , VILADROSA, Raymond
CPC分类号: H01J61/56 , H01J61/526
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公开(公告)号:EP2208404A1
公开(公告)日:2010-07-21
申请号:EP08838688.3
申请日:2008-10-16
发明人: CACHONCINLLE, Christophe , VILADROSA, Raymond , ROBERT, Eric , POUVESLE, Jean-Michel , KHACEF, Ahmed , DOZIAS, Sébastien
IPC分类号: H05H1/24
CPC分类号: H05H1/2406 , H05H2001/2412 , H05H2245/122
摘要: The invention concerns a new device based on very short pulsed discharges, generating plasmas balls and plumes over very long distances (up to several meters). These plasma balls are travelling in dielectric guide at the end of which there is generation of an apparent plasma plume like zone (which shape and intensity depend on the discharge repetition rate) wherein secondary mixture plasma can be produced close to a given surface by adding other gas fluxes in the main gas stream. The plasmas balls can be generated in gases at a repetition rate in the range from single shot to multi-kilohertz.
摘要翻译: 本发明涉及一种基于非常短的脉冲放电的新装置,其在非常长的距离(高达几米)内产生等离子体球和羽流。 这些等离子体球在介质导向器中行进,其末端产生表观等离子体羽状区域(其形状和强度取决于放电重复率),其中可以通过添加其他的等离子体产生接近给定表面的次级混合物等离子体 主气流中的气体通量。 等离子体球可以以单发到多千赫的重复频率在气体中产生。
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公开(公告)号:EP1535307A2
公开(公告)日:2005-06-01
申请号:EP03761657.0
申请日:2003-06-27
发明人: CACHONCINLLE, Christophe , DUSSART, Rémi , FLEURIER, Claude , POUVESLE, Jean-Michel , ROBERT, Eric , VILADROSA, Raymond
CPC分类号: H01J61/56 , H01J61/526
摘要: The invention concerns a radiation source, comprising an anode (2), a cathode (3), an electric discharge gap (4) between the anode (2) and the cathode (3) and a gas input conduit (30) in the discharge gap (4). The gas input conduit (30) is electrically connected to the anode and the cathode. The invention is characterized in that the gas input conduit (30) is supplied with gas by a gas supply conduit (32), designed to form between its portion (42) connected to the gas input conduit (30) and another of its portions connected to a fixed potential, an electric impedance such that it counters the generation of electric discharges inside the gas input conduit (30).
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