公开(公告)号：EP1535307A2

公开(公告)日：2005-06-01

申请号：EP03761657.0

申请日：2003-06-27

申请人： CENTRE NATIONAL DELA RECHERCHE SCIENTIFIQUE (CNRS) ,  Université d'Orleans

发明人： CACHONCINLLE, Christophe ,  DUSSART, Rémi ,  FLEURIER, Claude ,  POUVESLE, Jean-Michel ,  ROBERT, Eric ,  VILADROSA, Raymond

IPC分类号： H01J61/56 ,  H01J61/52

CPC分类号： H01J61/56 ,  H01J61/526

摘要： The invention concerns a radiation source, comprising an anode (2), a cathode (3), an electric discharge gap (4) between the anode (2) and the cathode (3) and a gas input conduit (30) in the discharge gap (4). The gas input conduit (30) is electrically connected to the anode and the cathode. The invention is characterized in that the gas input conduit (30) is supplied with gas by a gas supply conduit (32), designed to form between its portion (42) connected to the gas input conduit (30) and another of its portions connected to a fixed potential, an electric impedance such that it counters the generation of electric discharges inside the gas input conduit (30).

公开(公告)号：EP1535307B1

公开(公告)日：2013-06-19

申请号：EP03761657.0

申请日：2003-06-27

申请人： CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS) ,  Université d'Orleans

发明人： CACHONCINLLE, Christophe ,  DUSSART, Rémi ,  FLEURIER, Claude ,  POUVESLE, Jean-Michel ,  ROBERT, Eric ,  VILADROSA, Raymond

IPC分类号： H01J61/56 ,  H01J61/52

CPC分类号： H01J61/56 ,  H01J61/526