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22 条记录 (耗时 0.01 秒)

    FLUID CONTROLLER
    1.
    发明公开
    FLUID CONTROLLER 审中-公开
    FLUIDSTEUERUNG

    公开(公告)号：EP1498666A4

    公开(公告)日：2008-04-30

    申请号：EP02718632

    申请日：2002-04-23

    申请人： CKD CORP ,  FUJIKIN KK

    发明人： HOSHI GEORGE ,  OKABE TSUNEYUKI ,  GOSHIMA KENICHI ,  KOBAYASHI HIDEO ,  NAGAYA AKINORI ,  YAMAJI MICHIO ,  YOSHIKAWA KAZUHIRO ,  KAWANO YUJI

    IPC分类号： F17D3/01 ,  F24H1/10 ,  F16K27/00 ,  F16K49/00 ,  F24H1/12 ,  F24H9/18

    CPC分类号： F24H9/1863 ,  F16K27/003 ,  F16K49/002 ,  F24H1/121 ,  Y10T137/6606 ,  Y10T137/87885

    摘要： A fluid controller, wherein tape heaters (11) are disposed on both sides of lines (A) and (B), a plurality of clearances for storing tape heater holding clips (13) are provided between fluid control devices adjacent to each other in the lines (A) and (B), the tape heaters (11) are held in the lines (A) and (B) by the clips (13) holding the tape heaters from both sides thereof, the lines (A) and (B) with heater are installed on line support members (10) detachably installed on a base member (1), and heater insert holes (14) extending in longitudinal direction are provided in the line support member (10) and sheath heaters (12) are inserted into the holes (14).

    摘要翻译： 一种流体控制器，其中带加热器（11）设置在线（A）和（B）的两侧，用于存储带加热器保持夹（13）的多个间隙设置在流体控制装置 （A）和（B）中，带加热器（11）由从其两侧夹持带加热器的夹子（13）保持在线（A）和（B）中，线（A）和 ）安装在可拆卸地安装在基座构件（1）上的线路支撑构件（10）上，并且在线路支撑构件（10）和护套加热器（12）中设置沿长度方向延伸的加热器插入孔（14） 插入孔（14）中。

    VACUUM HEAT INSULATION VALVE
    2.
    发明公开
    VACUUM HEAT INSULATION VALVE 审中-公开
    VAKUUMWÄRMEISOLIERVENTIL

    公开(公告)号：EP1707858A4

    公开(公告)日：2008-10-08

    申请号：EP05703504

    申请日：2005-01-13

    申请人： FUJIKIN KK ,  OHMI TADAHIRO

    发明人： OHMI TADAHIRO ,  MINAMI YUKIO ,  TUBOTA KENJI ,  SHINOHARA TSUTOMU ,  YAMAJI MICHIO ,  IKEDA NOBUKAZU ,  MORIMOTO AKIHIRO ,  KAWADA KOJI ,  NARIAI TOSHIRO

    IPC分类号： F16K51/00 ,  F16L59/06 ,  F16K27/00 ,  F16K51/02

    CPC分类号： F16K51/02 ,  Y10T137/6606 ,  Y10T137/7043 ,  Y10T137/7062

    摘要： A vacuum heat insulation valve that can be used in high-temperature conditions in a gas supply system and gas discharge system and that can be drastically reduced in size and made compact because of excellent heat insulating performance of the valve. A vacuum heat insulation valve constructed from a valve that has a valve body and an actuator and from a vacuum insulation box that receives the valve. The vacuum heat insulation box (S) is constructed from a rectangular lower vacuum jacket (S5) that has on its side face a tubular vacuum insulation piping receiving section (J) and whose upper face is opened, and from a rectangular upper vacuum jacket (S4) that is air-tightly fitted to the lower vacuum jacket (S5) from the above and whose lower face is opened.

    摘要翻译： 一种真空绝热阀，可用于供气系统和排气系统的高温条件下，由于阀门具有优异的绝热性能，可大幅度减小尺寸并制成紧凑的结构。 由阀门构成的真空隔热阀，该阀门具有阀体和致动器，以及来自容纳阀门的真空绝热箱。 真空隔热箱（S）由矩形的下部真空夹套（S5）构成，其侧面具有管状真空隔热管接收部分（J）并且其上表面开口，并且从矩形上部真空夹套 S4）从上方气密地装配到下部真空夹套（S5）并且其下表面打开。

    CONTROLLER
    3.
    发明公开
    CONTROLLER 审中-公开
    控制

    公开(公告)号：EP1568928A4

    公开(公告)日：2008-05-21

    申请号：EP03770067

    申请日：2003-10-31

    申请人： FUJIKIN KK

    发明人： TOKUDA ICHIRO ,  TSUBOTA KENJI ,  YAMAJI MICHIO ,  SHINOHARA TSUTOMU

    IPC分类号： F16K31/163 ,  F16K31/524 ,  F16K31/52

    CPC分类号： F16K31/52491 ,  F16K31/163 ,  F16K31/52408 ,  Y10T74/18992

    摘要： A controller, comprising a power boosting means (5) having a tapered member (41) extending from the lower end of an operating shaft (3) downward, a disk-like member (42) provided at the upper end of a valve stem (16), and front and rear swing bodies (43, 44) disposed between the both members (41, 42) through the tapered member (41) so as to be opposed to each other and rotatable around swing shafts (45, 46), the swing bodies (43, 44) further comprising plate-like bodies (43a, 44a), upper contact faces (43b, 44b) formed on the upper parts of the bodies and allowed to abut on the tapered face of the tapered member (41), and lower contact faces (43c, 44c) formed on the lower parts of the bodies and allowed to abut on the upper face of the disk-like member (42), wherein the lower contact faces (43c, 44c) of the swing bodies are formed in the cam faces of arc shapes having their centers at center axes positioned eccentric from the axes of the swing shafts (45, 46).

    DIAPHRAGM VALVE FOR VACUUM EVACUATION SYSTEM
    4.
    发明公开
    DIAPHRAGM VALVE FOR VACUUM EVACUATION SYSTEM 有权
    蝶阀抽真空系统

    公开(公告)号：EP1596107A4

    公开(公告)日：2006-05-17

    申请号：EP04709325

    申请日：2004-02-09

    申请人： FUJIKIN KK ,  OHMI TADAHIRO

    发明人： OHMI TADAHIRO ,  IKEDA NOBUKAZU ,  YAMAJI MICHIO ,  KITANO MASAFUMI ,  MORIMOTO AKIHIRO

    IPC分类号： F04B45/04 ,  F16K7/16 ,  F16K51/02 ,  F16K7/12 ,  F16K27/00

    CPC分类号： F16K7/16 ,  F16K51/02

    摘要： A diaphragm valve for a vacuum evacuation system applicable to a semiconductor manufacturing system. Corrosion of members due to deposition/adhesion of products produced by thermolysis of gas, clogging due to products, and seat leakage are prevented. This diaphragm valve leads to reduction in the scale of the vacuum evacuation system facility, reduction in cost, and reduction in diameter of piping of the vacuum evacuation system for the purpose of decrease in vacuum evacuation time. Specifically, the diaphragm valve (1) comprises a body (2) having an inlet passage (6), an outlet passage (7), and a valve seat (8) provided between the passages, a diaphragm (3) which is provided to the body (2) and can be separated from the valve seat (8) and brought into contact with the same, and drive means (4) provided to the body (2) and adapted to separate the diaphragm (3) from the valve seat (8) and to bring the diaphragm (3) into contact with the same. The portion (25) of the body (2) and the portion (25) of the diaphragm (3) both coming into contact with a fluid are coated with a synthetic resin coating (5) of predetermined thickness.

    DEWATERING METHOD FOR GAS SUPPLY SYSTEMS
    5.
    发明公开
    DEWATERING METHOD FOR GAS SUPPLY SYSTEMS 有权
    排水法供气系统

    公开(公告)号：EP1130309A4

    公开(公告)日：2005-07-06

    申请号：EP00957104

    申请日：2000-09-11

    申请人： FUJIKIN KK

    发明人： IKEDA NOBUKAZU ,  MORIMOTO AKIHIRO ,  MINAMI YUKIO ,  HONIDEN TERUO ,  KAWADA KOUJI ,  KOMEHANA KATUNORI ,  HIRAI TOURU ,  YAMAJI MICHIO

    IPC分类号： B01D53/26 ,  F17D1/04 ,  F17D3/14

    CPC分类号： B01D53/26 ,  F17D3/14

    摘要： A dewatering method for gas supply systems which is adapted for effective removal of adsorbed water by ordinary-temperature exhaust processing without using the baking method. The dewatering method for gas supply systems which remove water remaining inside a gas supply system by passing a dewatering gas through the gas supply system, characterized in that the dewatering gas flow pressure is set at values which are above a minimum pressure at which the gas flow becomes a viscous flow but which are below the saturated vapor pressure of water at the dewatering gas flow temperature. The condition under which the dewatering gas becomes a viscous flow is determined by the mean free path of gas molecules becoming smaller than the diameter of the piping for the gas supply system. If the dewatering gas is exhausted at ordinary temperature under such condition, the adsorbed water on the inner surface of the piping or in the valve filter can be effectively removed.

    FLUID CONTROLLER
    9.
    发明公开
    FLUID CONTROLLER 有权
    流体控制

    公开(公告)号：EP1715230A4

    公开(公告)日：2012-01-18

    申请号：EP04799955

    申请日：2004-11-30

    申请人： FUJIKIN KK

    发明人： TSUBOTA KENJI ,  YAMAJI MICHIO ,  ITOI SHIGERU ,  SHINOHARA TSUTOMU ,  TOKUDA ICHIRO

    IPC分类号： F16K31/122 ,  F16K7/14

    CPC分类号： F16K7/14 ,  F16K31/1221

    摘要： A fluid control device 71 includes a working member 75 in automatic opening and closing, which is moved vertically by introduction or discharge of compressed fluid to or from a compressed fluid inlet chamber 90 formed in a casing 73 to move a valve element holder 5 to an opening position against bias force of a compression coil spring 77, and an working member 74 in manual opening and closing, which is moved vertically by a manual operation and directly presses the valve element holder 5 downward when it is moved downward.