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公开(公告)号:EP4228897A1
公开(公告)日:2023-08-23
申请号:EP21799369.0
申请日:2021-09-01
申请人: Cabot Corporation
发明人: ZHANG, Xiaofeng , ZHANG, Han , SULLIVAN, Sean S. , CHEN, Limeng , SANCHEZ GARCIA, Angelica M. , KYRLIDIS, Agathagelos , SHAH, Tushar , KUTSOVSKY, Yakov E. , FITZPATRICK, Darragh , HERSEE, Rachel , WALTER, Pablo
IPC分类号: B33Y70/00 , G03F7/00 , G03F7/004 , G03F7/027