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公开(公告)号：EP3615944A1
公开(公告)日：2020-03-04
申请号：EP18722147.8
申请日：2018-04-24
IPC分类号： G01P15/097 , G01C19/5733
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2.发明公开
公开(公告)号：EP3615945A1
公开(公告)日：2020-03-04
申请号：EP18722148.6
申请日：2018-04-24
IPC分类号： G01P15/097 , G01P21/00 , G01P15/08
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3.发明公开
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4.发明公开
公开(公告)号：EP2893362A2
公开(公告)日：2015-07-15
申请号：EP13771166.9
申请日：2013-09-04
IPC分类号： G01P15/097 , G01P15/18 , G01K7/32 , G01P1/00
CPC分类号： G01P1/006 , G01K7/32 , G01K11/26 , G01P15/097 , G01P15/18 , G01P2015/084
摘要： An inertial sensor comprising: a frame; a proof mass suspended from the frame; a pair of first resonant elements electrically coupled to the proof mass, or to an intermediate component mechanically coupled to the proof mass, each first resonant element coupled to an opposite side of the proof mass to the other, the first resonant elements being substantially identical to one another and having substantially identical electrostatic coupling with the proof mass when the sensor is not accelerating; wherein the first resonant elements and proof mass lie substantially in a plane, and wherein movement of the proof mass relative to the first resonant elements orthogonal to the plane alters the electrostatic coupling between the proof mass and the first resonant elements; drive means coupled to the first resonant elements for vibrating each of the first resonant elements; and a sensor assembly for detecting a shift in the resonant frequency of each of the first resonant elements; and processing means for summing the shifts of each of the first resonant elements to provide a measure of acceleration of the proof mass parallel to a first axis, the first axis being orthogonal to the plane.
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