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    Detection apparatus for optical reflectance measurement
    1.
    发明公开
    Detection apparatus for optical reflectance measurement 有权
    Erfassungsvorrichtung zur optischen Reflexionsmessung

    公开(公告)号：EP2345888A1

    公开(公告)日：2011-07-20

    申请号：EP10188359.3

    申请日：2010-10-21

    申请人： Canon Kabushiki Kaisha

    发明人： Sumiyoshi, Yuhei ,  Tokimitsu, Takumi ,  Yuuki, Hiroyuki

    IPC分类号： G01N21/64 ,  G02B27/09 ,  G01N21/47 ,  G01N21/55

    CPC分类号： G01N21/645 ,  G01N21/4738 ,  G01N21/55 ,  G01N2201/0631 ,  G02B27/0927 ,  G02B27/0994

    摘要： A detection apparatus which illuminates a sample (4) and detects light reflected by the sample, comprises a light source (1), a columnar reflecting member (3) having a columnar reflecting surface (3s) which reflects light having entered a first end (3a) of the columnar reflecting member by a plurality of number of times, and emits the light from a second end (3b) of the columnar reflecting member, a mirror (2) which reflects light radiated by the light source so as to guide to the first end and a detector, wherein the sample (4) is illuminated with the light emitted from the second end, and the detector (6) is configured to detect the light which has been reflected by the sample and has passed through the columnar reflecting member (3), and a reflecting surface (2) of the mirror is a concave surface, and a shape of a reflecting surface of the mirror on a section perpendicular to an axis of the columnar reflecting member is concave.

    摘要翻译： 照射样品（4）并检测由样品反射的光的检测装置包括光源（1），具有反射已经进入第一端的光的柱状反射表面（3s）的柱状反射部件（3） 并且从柱状反射构件的第二端（3b）发射光，反射光（2），其反射由光源照射的光，以引导至 第一端和检测器，其中样品（4）被从第二端发射的光照射，并且检测器（6）被配置为检测已被样品反射并已经通过柱状反射的光 构件（3）和反射镜的反射面（2）是凹面，并且在垂直于柱状反射构件的轴线的部分上的反射镜的反射面的形状是凹形的。