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8 条记录 (耗时 0.018 秒)

    ANORDNUNG ZUR LAGERUNG EINES OPTISCHEN BAUELEMENTS
    3.
    发明公开
    ANORDNUNG ZUR LAGERUNG EINES OPTISCHEN BAUELEMENTS 审中-公开
    安排用于存储的光学元件的

    公开(公告)号：EP1899756A2

    公开(公告)日：2008-03-19

    申请号：EP06805630.8

    申请日：2006-06-30

    申请人： Carl Zeiss SMT AG

    发明人： SCHÖPPACH, Armin ,  ZENGERLING, Christian

    IPC分类号： G02B7/02 ,  G03F7/20

    CPC分类号： G03F7/70825 ,  G02B7/004 ,  G02B7/023 ,  G02B7/1824

    摘要： The invention relates to an arrangement for mounting an optical element (18, 21) having an outer peripheral area, particularly a lens or a mirror, relative to a support (6) via at least three coupling locations (17) located on the outer peripheral area of the optical element (18, 21). The optical element (18, 21) is held in a non-positive manner via the coupling locations (17) in at least one direction by means of elastic elements (14, 15, 16), these elastic elements for each coupling location (17) being located in a bearing device (1) with a supporting body (2). The bearing devices (1) hold the optical element in a statically appointed manner on the support (6).

    OPTISCHE BANK
    4.
    发明授权
    OPTISCHE BANK 有权
    光学BANK

    公开(公告)号：EP1212596B1

    公开(公告)日：2003-10-29

    申请号：EP00991971.3

    申请日：2000-08-31

    申请人： Carl Zeiss

    发明人： SCHÖPPACH, Armin ,  KAUFMANN, Paul ,  MÜNKER, Hartmut

    IPC分类号： G01M11/04

    CPC分类号： G01M11/04

    摘要： The invention relates to an optical bank which has a base plate and which can be permanently connected to an associated component. A receiving element (19) for other optical elements which is arranged in such a way in relation to the base plate (7) with connecting elements (21) that it is deformable in its entirety in relation to said base plate (7), is allocated to the same.

    AKTUATOR UND PROJEKTIONSBELICHTUNGSANLAGE
    6.
    发明公开
    AKTUATOR UND PROJEKTIONSBELICHTUNGSANLAGE 有权

    公开(公告)号：EP2300877A1

    公开(公告)日：2011-03-30

    申请号：EP09776995.4

    申请日：2009-07-07

    申请人： Carl Zeiss SMT GmbH

    发明人： WEBER, Ulrich ,  HEMBACHER, Stefan ,  SCHÖPPACH, Armin

    IPC分类号： G03F7/20 ,  H01L41/09

    CPC分类号： G03F7/70141 ,  F16H21/44 ,  G03F7/70258 ,  G03F7/70825 ,  H02N1/002 ,  H02N2/023 ,  Y10T74/18992

    摘要： The actuator (1) according to the invention comprises a housing (2) and a rotor (3) that can be moved in relation to the housing (2) in the effective direction of the actuator, wherein the actuator (1) comprises an advancing unit that is connected to the rotor (3) at least part of the time. The advancing unit comprises at least one deformation unit (6) and at least one deformer (5) for deforming the deformation unit (6). The at least one deformer (5) is suited to deform the deformation unit (6) perpendicular to the effective direction of the actuator (1) such that the total length of the deformation unit (6) changes in the effective direction as a result of the deformation. The invention further relates to a projection exposure system (310) for semiconductor lithography comprising an actuator (1) according to the invention, and to a method for operating an actuator (1) according to the invention.

    摘要翻译： 致动器包括壳体，可移动部件和至少临时连接到可动部件的前进单元。 前进单元包括变形单元和变形器，其被构造成使得垂直于致动器的有效方向的矢量分量使变形单元变形，使得变形单元的总长度在致动器的有效方向上变化，作为 形变。 可移动部件被构造成在去除变形单元上的矢量分量时沿着致动器的有效方向移动，并且在去除变形单元上的矢量分量时沿着致动器的有效方向设置变形单元。

    OPTICAL PROJECTION SYSTEM
    7.
    发明公开
    OPTICAL PROJECTION SYSTEM 有权
    光学投影系统

    公开(公告)号：EP1803012A1

    公开(公告)日：2007-07-04

    申请号：EP05802258.3

    申请日：2005-10-01

    申请人： Carl Zeiss SMT AG

    发明人： RAU, Johannes ,  SCHÖPPACH, Armin ,  GELLRICH, Bernhard ,  KUGLER, Jens ,  MAHLMANN, Martin ,  GEUPPERT, Bernhard ,  PETASCH, Thomas ,  FÜRTER, Gerhard

    IPC分类号： G02B7/00 ,  G03F7/20 ,  G02B17/08

    CPC分类号： G03F7/7015 ,  G02B7/00 ,  G02B7/008 ,  G02B7/021 ,  G02B7/028 ,  G02B7/22 ,  G02B17/08 ,  G02B17/0804 ,  G02B17/0812 ,  G02B17/0892 ,  G03F7/70808 ,  G03F7/70825 ,  G03F7/70833 ,  G03F7/70883

    摘要： An optical projection unit comprising a first optical element module and at least one second optical element module is provided. The first optical element module comprises a first housing unit and at least a first optical element, the first optical element being received within the first housing unit and having an optically used first region defining a first optical axis. The at least one second optical element module is located adjacent to the first optical element module and comprises at least one second optical element, the second optical element defining a second optical axis of the optical projection unit. The first housing unit has a central first housing axis and an outer wall extending in a circumferential direction about the first housing axis. The first optical axis is at least one of laterally offset and inclined with respect to the first housing axis. Furthermore, the first housing axis is substantially collinear with the second optical axis.

    摘要翻译： 提供了包括第一光学元件模块和至少一个第二光学元件模块的光学投影单元。 第一光学元件模块包括第一外壳单元和至少第一光学元件，第一光学元件容纳在第一外壳单元内并且具有限定第一光轴的光学使用的第一区域。 所述至少一个第二光学元件模块位于所述第一光学元件模块附近并且包括至少一个第二光学元件，所述第二光学元件限定所述光学投影单元的第二光轴。 第一壳体单元具有中央第一壳体轴线和围绕第一壳体轴线沿圆周方向延伸的外壁。 第一光轴相对于第一壳体轴线横向偏移和倾斜中的至少一个。 此外，第一壳体轴线与第二光轴基本共线。

    OPTISCHE BANK
    8.
    发明公开
    OPTISCHE BANK 有权
    光学BANK

    公开(公告)号：EP1212596A1

    公开(公告)日：2002-06-12

    申请号：EP00991971.3

    申请日：2000-08-31

    申请人： Carl Zeiss

    发明人： SCHÖPPACH, Armin ,  KAUFMANN, Paul ,  MÜNKER, Hartmut

    IPC分类号： G01M11/04

    CPC分类号： G01M11/04

    摘要： The invention relates to an optical bank which has a base plate and which can be permanently connected to an associated component. A receiving element (19) for other optical elements which is arranged in such a way in relation to the base plate (7) with connecting elements (21) that it is deformable in its entirety in relation to said base plate (7), is allocated to the same.