ANORDNUNG ZUR VERMINDERUNG DER KOHERENZ EINES LICHTBüNDELS
    1.
    发明公开
    ANORDNUNG ZUR VERMINDERUNG DER KOHERENZ EINES LICHTBüNDELS 审中-公开
    安排用于减少相干光

    公开(公告)号:EP1543375A1

    公开(公告)日:2005-06-22

    申请号:EP03798901.9

    申请日:2003-09-11

    IPC分类号: G02B27/48 G02B27/14

    摘要: The invention relates to a device for reducing the coherence of a beam of light, especially a laser beam, for illuminating an image surface or a sample. According to the invention, said device comprises a beam splitter (2) whereon an incident beam (1) is split into two orthogonal partial beams (4,6), and two reflecting elements whereof at least one is embodied in the form of a reversing prism (7). One partial beam (4,6) is respectively directed at a reflecting element and is reflected therefrom back to the beam splitter (2). The reflected elements are positioned at various distances from the beam splitter (2) such that the partial beams (4,6) pass once more through the beam splitter (2) in an opposite direction and are combined to form an outgoing beam (8) wherein the coherence is reduced.