-
公开(公告)号：EP3557306A3
公开(公告)日：2020-01-15
申请号：EP19164289.1
申请日：2019-03-21
摘要： Verschiedene Aspekte der Erfindung betreffen Techniken, um mittels winkelvariabler Beleuchtung Autofokus-Techniken für ein Messobjekt (499) zu ermöglichen. Dabei werden Bilder bei einer Vielzahl von winkelvariablen Beleuchtungsgeometrien (301, 302) erfasst. Eine Auswertung der erfassten Bilder erfolgt, um die Z-Position zu bestimmen.
-
公开(公告)号：EP3548836A1
公开(公告)日：2019-10-09
申请号：EP17787400.5
申请日：2017-10-20
发明人： STOPPE, Lars , OHRT, Thomas , STICKER, Markus
-
公开(公告)号：EP3394656A2
公开(公告)日：2018-10-31
申请号：EP16825751.7
申请日：2016-12-22
CPC分类号： G02B21/084 , G02B21/10 , G02B21/125
摘要： A device for capturing images is provided in which an image-capturing device (14) and an illumination device (13) are arranged on the same side of a sample plane (11). The image-capturing device (13) has illumination portions which can be controlled independently of each other, for example individual light sources, in order to make it possible for the sample (12) in the sample plane (11) to be illuminated at different angles and/or from different directions. In this way, a plurality of images can be captured with different illumination situations which can be combined into a resulting image having improved properties.
-
公开(公告)号：EP2601551A1
公开(公告)日：2013-06-12
申请号：EP11733817.8
申请日：2011-06-17
发明人： STICKER, Markus
CPC分类号： G02B21/245 , G02B21/367
摘要： Microscopic device for imaging a sample substance (1), comprising: - a microscopic imaging system, and - means for automatically displacing the focal plane along the optical axis (4) of the imaging system into a Z-position, in which the sample substance (1) to be imaged is situated, characterized by - a sample beam (10) which emerges from an interferometer and is directed in the Z-direction through the sample substance (1), wherein the interference signals arising as a result of interference of the light of the sample beam (10) that is reflected or backscattered from optically active interfaces and/or structures with the reference beam of the interferometer are provided for determining the Z-positions of the interfaces and/or structures of the sample, - an evaluation device for determining the Z-position of the sample substance (1), - an adjusting device, designed for displacing the focal plane and the sample substance (1) relative to one another until the sample substance (1) is situated in the focal plane, and - a drive unit connected to the evaluation device and the adjusting device and serving for generating actuating commands for automatically displacing the focal plane into the Z-position determined.
-
-
-
搜索结果
4 条记录 (耗时 0.012 秒)
