专利检索 ap:("Carl Zeiss MultiSEM GmbH") AND inv:"BOLSINGER, Wilhelm" 第 1 页

1.

发明公开
PARTICLE BEAM SYSTEM COMPRISING A MULTI-BEAM DEFLECTION DEVICE AND A BEAM STOP, METHOD FOR OPERATING THE PARTICLE BEAM SYSTEM AND ASSOCIATED COMPUTER PROGRAM PRODUCT 审中-公开

公开(公告)号：EP4066270A1

公开(公告)日：2022-10-05

申请号：EP20812226.7

申请日：2020-11-24

申请人： Carl Zeiss MultiSEM GmbH

发明人： SCHUBERT, Stefan , SCHUMACHER, Dieter , ESSERS, Erik , MÜLLER, Ingo , THOMA, Arne , JACOBI, Jörg , BOLSINGER, Wilhelm , ZEIDLER, Dirk

IPC分类号： H01J37/04 , H01J37/28