公开(公告)号：EP1543373B1

公开(公告)日：2006-06-28

申请号：EP03785604.4

申请日：2003-09-22

申请人： Carl Zeiss SMS GmbH

发明人： BISCHOFF, Jörg ,  BRUNNER, Robert ,  BURKHARDT, Matthias ,  ERDMANN, Lars ,  STEINER, Reinhard

IPC分类号： G02B27/48

CPC分类号： G02B27/106 ,  G02B21/06 ,  G02B27/123 ,  G02B27/126 ,  G02B27/144 ,  G02B27/145

摘要： The invention relates to an lighting device comprising a beam multiplication device (1) which divides a coherent beam (18) into a plurality of partial beams (20, 21) and combines said partial beams to form a bundle of rays (26) once they have followed paths having different optical lengths, the partial beams (27, 28, 29, 30) diverging in said bundle of rays. Said lighting device also comprises a micro-optical system (3) which is arranged downstream from the beam multiplication device (1) and comprises a plurality of optical elements (19) arranged in a grid-type manner. Said bundle of rays (26) hits the micro-optical system (3), and the partial beams (27, 28, 29, 30) of the bundle of rays (26) thus hit each optical element (19) at different angles, in such a way that a plurality of illumination partial beams (M1, M2, M3, M4) irradiate from each optical element (19) in different diffusion directions and can be used to illuminate an object field (31).

公开(公告)号：EP1543373A2

公开(公告)日：2005-06-22

申请号：EP03785604.4

申请日：2003-09-22

申请人： Carl Zeiss SMS GmbH

发明人： BISCHOFF, Jörg ,  BRUNNER, Robert ,  BURKHARDT, Matthias ,  ERDMANN, Lars ,  STEINER, Reinhard

IPC分类号： G02B27/48

CPC分类号： G02B27/106 ,  G02B21/06 ,  G02B27/123 ,  G02B27/126 ,  G02B27/144 ,  G02B27/145

摘要： The invention relates to an lighting device comprising a beam multiplication device (1) which divides a coherent beam (18) into a plurality of partial beams (20, 21) and combines said partial beams to form a bundle of rays (26) once they have followed paths having different optical lengths, the partial beams (27, 28, 29, 30) diverging in said bundle of rays. Said lighting device also comprises a micro-optical system (3) which is arranged downstream from the beam multiplication device (1) and comprises a plurality of optical elements (19) arranged in a grid-type manner. Said bundle of rays (26) hits the micro-optical system (3), and the partial beams (27, 28, 29, 30) of the bundle of rays (26) thus hit each optical element (19) at different angles, in such a way that a plurality of illumination partial beams (M1, M2, M3, M4) irradiate from each optical element (19) in different diffusion directions and can be used to illuminate an object field (31).

公开(公告)号：EP1430354A2

公开(公告)日：2004-06-23

申请号：EP02800132.9

申请日：2002-09-27

申请人： Carl Zeiss SMS GmbH

发明人： ERDMANN, Lars ,  STEINER, Reinhard ,  BRUNNER, Robert ,  BURKHARDT, Matthias ,  BISCHOFF, Jörg

IPC分类号： G02B27/44 ,  G02B27/48

CPC分类号： G02B27/4244 ,  G02B27/425 ,  G02B27/48

摘要： The invention relates to a lighting system comprising a coherence reducer (1) which is provided with a mirror (2). Said coherence reducer introduces different phase shifts into a supplied coherent beam cluster (10) by means of the mirror (2), according to the position in the beam cross-section, and produces an illumination beam cluster (11). The inventive system also comprises an illuminating optical arrangement which is arranged downstream from the coherence reducer (1) and is used to illuminate an object field. Said optical arrangement comprises a micro-optical arrangement (4; 19) having a plurality of optical elements (9; 20) which are arranged in the form of a raster, and an imaging optical arrangement (5) which is arranged downstream from the micro-optical arrangement (4; 19). According to the invention, the mirror comprises an element (2) having a surface which is divided into a plurality of parallel partial surfaces (8) which are staggered in the perpendicular direction in relation to their surface. The supplied beam cluster (10) is reflected off the partial surfaces (8) of the mirror in such a way that partial illumination beam clusters (11) project from the partial surfaces (8) of the mirror, together forming the illumination beam cluster having the different phase shifts.

公开(公告)号：EP1543374A1

公开(公告)日：2005-06-22

申请号：EP03798900.1

申请日：2003-09-11

申请人： Carl Zeiss SMS GmbH

发明人： BRUNNER, Robert ,  BURKHARDT, Matthias ,  ERDMANN, Lars ,  MENCK, Alexander

IPC分类号： G02B27/48

CPC分类号： G02B27/144 ,  G02B27/143 ,  G02B27/145 ,  G02B27/48

摘要： The invention relates to a device for reducing the coherence of a light beam, especially a laser light beam for illuminating the image surface of a probe. According to the invention, said device comprises a beam divider, e.g. a first divider cube (2) whereon an incident beam (1) is divided into two partial beams (4,5), a device for reconstituting a beam, e.g. a second divider cube (6) whereon the partial beams (4,5) are recombined to form an outgoing light beam (10), and deflector elements, e.g. mirrors (8,9) which are positioned in the light paths of the partial beams (4,5) between the two devices. The lengths of the light paths of the partial beams (4,5) vary and the length difference is such that the coherence of the wave trains/phase space cells is exceeded, whereby the ability to cause mutual interference is reduced or removed.