公开(公告)号：EP2511764A1

公开(公告)日：2012-10-17

申请号：EP12175894.0

申请日：2009-02-24

申请人： Carl Zeiss SMS GmbH

发明人： Budach, Michael ,  Bret, Tristan ,  Edinger, Klaus ,  Hofmann, Thorsten

IPC分类号： G03F1/00 ,  G03F1/74 ,  H01J37/305 ,  H01J37/304 ,  C23C16/04

摘要： The present invention relates to a method for processing an object with miniaturized structures, having the steps of:
a) feeding the reaction gas onto a surface of the object;
b) processing the object by directing an energetic beam onto a processing site on the surface of the object, in order to deposit material on the object or to remove material from the object,
c) scanning the surface of the object with the energetic beam and detecting interaction products of the energetic beam with the object, and
d) deciding whether the processing of the object must be continued or can be terminated with the aid of information which is obtained from the detected interaction products of the energetic beam with the object,
e) in which the processing of the object in step b) is performed with a first set of beam parameters of the beam, and the scanning of the surface in step c) is performed with a second set of beam parameters of the energetic beam, and the second set of beam parameters deviates from the first set of the energetic beam parameters.

摘要翻译： 本发明涉及一种用小型化结构处理物体的方法，具有以下步骤：a）将反应气体进料到物体的表面上; b）通过将能量束引导到物体表面上的处理位置来处理物体，以便将材料沉积在物体上或从物体上去除材料，c）用能量束扫描物体的表面， 检测能量束与物体的相互作用产物，以及d）决定物体的处理是否必须继续，或者借助从检测到的能量束与物体的相互作用产物得到的信息来终止，e ），其中用步骤b）中的对象的处理用波束的第一组波束参数执行，并且步骤c）中的表面的扫描是用能量束的第二组波束参数执行的，以及 第二组光束参数偏离第一组能量束参数。