发明公开
EP2511764A1 Method for processing an object with miniaturized structures
审中-公开
Verfahren zur Verarbeitung eines Objekts mit miniaturisierten Strukturen
- 专利标题： Method for processing an object with miniaturized structures
- 专利标题（中）： Verfahren zur Verarbeitung eines Objekts mit miniaturisierten Strukturen
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申请号： EP12175894.0申请日： 2009-02-24
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公开(公告)号： EP2511764A1公开(公告)日： 2012-10-17
- 发明人: Budach, Michael , Bret, Tristan , Edinger, Klaus , Hofmann, Thorsten
- 申请人： Carl Zeiss SMS GmbH
- 申请人地址： Carl-Zeiss-Promenade 10 07745 Jena DE
- 专利权人： Carl Zeiss SMS GmbH
- 当前专利权人： Carl Zeiss SMS GmbH
- 当前专利权人地址： Carl-Zeiss-Promenade 10 07745 Jena DE
- 代理机构： Müller, Utz
- 优先权： DE102008011530 20080228; DE102008011531 20080228
- 主分类号： G03F1/00
- IPC分类号： G03F1/00 ; G03F1/74 ; H01J37/305 ; H01J37/304 ; C23C16/04
摘要：
The present invention relates to a method for processing an object with miniaturized structures, having the steps of:
a) feeding the reaction gas onto a surface of the object;
b) processing the object by directing an energetic beam onto a processing site on the surface of the object, in order to deposit material on the object or to remove material from the object,
c) scanning the surface of the object with the energetic beam and detecting interaction products of the energetic beam with the object, and
d) deciding whether the processing of the object must be continued or can be terminated with the aid of information which is obtained from the detected interaction products of the energetic beam with the object,
e) in which the processing of the object in step b) is performed with a first set of beam parameters of the beam, and the scanning of the surface in step c) is performed with a second set of beam parameters of the energetic beam, and the second set of beam parameters deviates from the first set of the energetic beam parameters.
a) feeding the reaction gas onto a surface of the object;
b) processing the object by directing an energetic beam onto a processing site on the surface of the object, in order to deposit material on the object or to remove material from the object,
c) scanning the surface of the object with the energetic beam and detecting interaction products of the energetic beam with the object, and
d) deciding whether the processing of the object must be continued or can be terminated with the aid of information which is obtained from the detected interaction products of the energetic beam with the object,
e) in which the processing of the object in step b) is performed with a first set of beam parameters of the beam, and the scanning of the surface in step c) is performed with a second set of beam parameters of the energetic beam, and the second set of beam parameters deviates from the first set of the energetic beam parameters.
公开/授权文献
- EP2511764B1 Method for processing an object with miniaturized structures 公开/授权日：2020-04-01
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