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1.发明公开IN LAGE, FORM UND/ODER DEN OPTISCHEN EIGENSCHAFTEN VERÄNDERBARE BLENDEN- UND/ODER FILTERANORDNUNG FÜR OPTISCHE GERÄTE, INSBESONDERE MIKROSKOPE 审中-公开在适当的位置，以形成和/或用于光设备的可变光学性能光圈和/或过滤器装置，特别是MICROSCOPE
公开(公告)号：EP1680699A1
公开(公告)日：2006-07-19
申请号：EP04797515.6
申请日：2004-11-02
申请人： Carl Zeiss SMS GmbH
发明人： BÖHM, Klaus , SCHÄFFER, Peter , HARNISCH, Wolfgang , ENGEL, Thomas , ZIBOLD, Axel , GEH, Bernd
CPC分类号： G03F7/701 , G02B5/005 , G02B21/24 , G02B26/007
摘要： The invention relates to the use of two-dimensional arrays comprising individually triggerable elements for creating diaphragms in beam paths of optical devices. At least one two-dimensional array comprising individually triggerable elements for creating diaphragms and/or filters is disposed in the optical imaging and/or illuminating beam path of the diaphragm array and/or filter array for optical devices, the shape, position, and/or optical properties of which can be modified, and is connected to a control unit for triggering the individual elements. The inventive technical solution allows diaphragms and/or filters to be modified very quickly regarding the geometry, optical properties, and/or position thereof by electronically triggering the same. Said modifications can also be done online as an optical fine-tuning step during the measurement and adjustment process. Furthermore, using said systems makes it possible to dispense with the expensive and time-consuming production of diaphragms having geometrical shapes.
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