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公开(公告)号：EP1417159A1
公开(公告)日：2004-05-12
申请号：EP02794791.0
申请日：2002-08-14
发明人： DINGER, Udo , EISERT, Frank , WEISER, Martin , KNAPP, Konrad , MITRA, Ina , MORIAN, Hans
CPC分类号： G21K1/06 , C03C10/0009 , C03C19/00 , C03C23/0055 , C03C2204/08
摘要： The invention relates to substrate material for X-ray optical components for X-rays of wavelength μR, comprising a glass ceramic material with a glass phase made of amorphous material and with a crystal phase containing microcrystallites. The amorphous material has a positive thermal expansion and the microcrystallites have a negative thermal expansion, and the stoichiometric ratio of crystal to glass phase is set such that the thermal expansion α of the glass ceramic material, within a temperature range of 20 °C to 100 °C, is
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公开(公告)号：EP1417159B1
公开(公告)日：2010-11-17
申请号：EP02794791.0
申请日：2002-08-14
申请人： Schott AG , Carl Zeiss SMT AG
发明人： DINGER, Udo , EISERT, Frank , WEISER, Martin , KNAPP, Konrad , MITRA, Ina , MORIAN, Hans
CPC分类号： G21K1/06 , C03C10/0009 , C03C19/00 , C03C23/0055 , C03C2204/08
摘要： The invention relates to substrate material for X-ray optical components for X-rays of wavelength μR, comprising a glass ceramic material with a glass phase made of amorphous material and with a crystal phase containing microcrystallites. The amorphous material has a positive thermal expansion and the microcrystallites have a negative thermal expansion, and the stoichiometric ratio of crystal to glass phase is set such that the thermal expansion α of the glass ceramic material, within a temperature range of 20 °C to 100 °C, is
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3.发明公开EUV-PROJEKTIONSOBJEKTIV MIT SPIEGELN AUS MATERIALIEN MIT UNTERSCHIEDLICHEM VORZEICHEN DER STEIGUNG DER TEMPERATURABHÄNGIGKEIT DES WÄRMEAUSDEHNUNGSKOEFFIZIENTEN NAHE DER NULLDURCHGANGSTEMPERATUR 审中-公开具有不同标牌材料接近零隧道温度的热膨胀系数的温度依赖性的斜率MIRROR EUV投影镜头
公开(公告)号：EP1664933A1
公开(公告)日：2006-06-07
申请号：EP03755564.6
申请日：2003-09-27
申请人： Carl Zeiss SMT AG
发明人： DINGER, Udo , EISERT, Frank , KOEHLER, Stefan , OCHSE, Andreas , ZELLNER, Johannes , LOWISCH, Martin , LAUFER, Timo
CPC分类号： G03F7/70958 , B82Y10/00 , G02B1/00 , G02B5/0891 , G02B7/181 , G03F7/70891 , G21K1/062 , G21K2201/065
摘要： The invention relates to a projection lens (1) for short wavelengths, in particular, for wavelengths μ
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