METHODS AND DEVICES IN AN OPTICAL SYSTEM
    7.
    发明公开
    METHODS AND DEVICES IN AN OPTICAL SYSTEM 有权
    的方法和装置中的光学系统

    公开(公告)号:EP1210634A2

    公开(公告)日:2002-06-05

    申请号:EP00953611.1

    申请日:2000-08-10

    申请人: Cellavision AB

    CPC分类号: G02B7/28 G02B7/36

    摘要: In a method in an optical system, a structure having a periphery is reproduced by means of an objective and an electronic representation of the structure is produced. Moreover is it analysed how the intensity in the electronic representation varies at the periphery of the structure. This intensity variation is then used to determine an application focus value which indicates how the current focus position of the objective is related to an optimal focus position for the application at issue. The method can be used, for example, for automatic focusing or for optical checking of objects.