摘要:
The invention relates to a sensor (4) for detecting a rotation rate (8) of an object (6, 20), comprising: - a sensor element (2), which is designed to vibrate at an angle to the rotation axis (10) of the rotation rate (8) to be detected at an excitation frequency on a resetting element (14) fastened in a spatially fixed manner to the object (6, 20), such that the sensor element (2) is deflected at a reaction frequency in a reaction direction (18) at an angle to the rotation axis (10) and at an angle to the vibration direction (16) owing to the Coriolis force (18); and - a measuring transducer (32), which is designed to detect the vibration in the reaction direction (18) - wherein the vibratable sensor element (2) is formed in such a manner that a comparison of a temperature-dependent displacement of a frequency spacing between the excitation frequency and the reaction frequency and a temperature-dependent position (50) of the sensor element (2) on the object (6, 20) satisfies a predefined condition.
摘要:
The invention relates to a micromechanical yaw rate sensor, comprising a substrate, the base area of which is oriented parallel to the x-y plane of a Cartesian coordinate system (x, y, z), wherein the yaw rate sensor comprises at least one first (1) and a second seismic mass (2), which are coupled to at least one first drive device (14), and are mounted, such that the first and second seismic masses (2) are driven in a drive mode so as to deflect in phase opposition, wherein the yaw rate sensor is designed such that it can detect yaw rates about at least two sensitive axes (z, y) that are substantially perpendicular to each other, wherein at least the second seismic mass (2) is designed as a frame, which surrounds the first seismic mass (1) at least partially with respect to the positioning in the x-y plane.