UNTERSUCHUNGSVORRICHTUNG UND -VERFAHREN ZUR ERFASSUNG VON EIGENSCHAFTEN EINES MATERIALS IN EINER BAUELEMENT-PROBE
    3.
    发明公开
    UNTERSUCHUNGSVORRICHTUNG UND -VERFAHREN ZUR ERFASSUNG VON EIGENSCHAFTEN EINES MATERIALS IN EINER BAUELEMENT-PROBE 审中-公开
    分析装置和方法确定材料性能的组件中的样品

    公开(公告)号:EP2907174A1

    公开(公告)日:2015-08-19

    申请号:EP13791734.0

    申请日:2013-10-09

    申请人: CreaPhys GmbH

    IPC分类号: H01L51/56 G01R31/26

    摘要: The invention relates to an analysis device (100) for detecting characteristics of at least one material contained in at least one component sample (1), said device comprising: a measuring device (10) which is used to detect optical and/or electrical measured values in the component sample (1); a simulation and evaluation device (20), designed to adapt a simulation function, which contains the characteristics of the component sample (1) as parameters, to the optical and/or electrical measured values; and an output device (30), designed to output the material characteristics from the adapted simulation function. In addition, the analysis device is provided with a preparation device (80), designed to produce the at least one component sample (1), and a controller (40), which is used to control the preparation device (80) and at least one of the measuring device (10) and the simulation and evaluation device (20) according to a stored control function. Also disclosed is a method for detecting characteristics of at least one material contained in a component sample (1).