公开(公告)号：EP1502334B1

公开(公告)日：2009-12-23

申请号：EP03719926.2

申请日：2003-04-23

申请人： Cymer, Inc.

发明人： YAGER, Thomas, A. ,  PARTLO, William, N. ,  SANDSTROM, Richard, L. ,  PAN, Xiaojiang ,  MELCHIOR, John, T. ,  Algots, John M. ,  BALL, Matthew ,  ERSHOV, Alexander, I. ,  FLEUROV, Vladimir ,  GILLESPIE, Walter, D. ,  GLATZEL, Holger, K. ,  LUBLIN, Leonard ,  MARSH, Elizabeth ,  MORTON, Richard, G. ,  UJAZDOWSKI, Richard, C. ,  WARKENTIN, David, J. ,  WEBB, R., Kyle

IPC分类号： H01S3/225 ,  H01S3/034 ,  H01S3/23 ,  G03F7/20

CPC分类号： H01S3/225 ,  G03F7/7055 ,  H01S3/1024 ,  H01S3/2251 ,  H01S3/2258 ,  H01S3/2333

摘要： The present invention provides long life optics for a modular, high repetition rate, ultraviolet gas discharge laser systems (Fig. 1B) producing a high repetition rate high power output beam (38). The invention includes solutions to a surface damage problem discovered by Applicants on CaF2 optics (4260) (422)(424)(426) located in high pulse intensity sections (10)(26) of the output beam (14C) of prototype laser systems. Embodiments include an enclosed (4) and purged beam path (14C) with beam pointing control (40A) (40B)(6) for beam delivery of billions of output laser pulses (38). Optical components and modules described herein are capable of controlling ultraviolet laser output pulses (14A) with wavelength less than 200nm with average output pulse intensities greater than 1.75×106 Watts/cm2 and with peak intensity or greater 3.5×106 Watts/cm2 for many billions of pulses (14A) as compared to prior art components and modules which failed after only a few minutes in these pulse intensities.