公开(公告)号：EP1108274A1

公开(公告)日：2001-06-20

申请号：EP99938945.5

申请日：1999-08-02

申请人： Cymer, Inc.

发明人： WEBB, R., Kyle

IPC分类号： H01S3/041 ,  H01S3/225

CPC分类号： H01S3/036 ,  H01S3/225

摘要： A blower assembly (70) for circulating gases in a laser chamber (10). The blower assembly (70) includes a driving assembly (132) operatively engaged to a drive side shaft (72) for rotating a fan assembly (102). A first bearing assembly (90A) supports the drive side shaft (72). The blower assembly (70) may further include an idle side shaft (73) for supporting the fan assembly (102) and a second bearing assembly (90B) circumscribing the idle side shaft (73). The driving assembly (132) includes a motor (130) disposed over a rotor (110). The fan assembly (102) includes a pair of hubs (104A, 104B) supporting a plurality of blades (110). The first and second bearing assemblies (90A, 90B) comprise a ceramic compound, such as silicon nitride (Si3N4), and are lubricated with a synthetic oil, such as perfluoropolyalkylether (PFPE).

公开(公告)号：EP1502334B1

公开(公告)日：2009-12-23

申请号：EP03719926.2

申请日：2003-04-23

申请人： Cymer, Inc.

发明人： YAGER, Thomas, A. ,  PARTLO, William, N. ,  SANDSTROM, Richard, L. ,  PAN, Xiaojiang ,  MELCHIOR, John, T. ,  Algots, John M. ,  BALL, Matthew ,  ERSHOV, Alexander, I. ,  FLEUROV, Vladimir ,  GILLESPIE, Walter, D. ,  GLATZEL, Holger, K. ,  LUBLIN, Leonard ,  MARSH, Elizabeth ,  MORTON, Richard, G. ,  UJAZDOWSKI, Richard, C. ,  WARKENTIN, David, J. ,  WEBB, R., Kyle

IPC分类号： H01S3/225 ,  H01S3/034 ,  H01S3/23 ,  G03F7/20

CPC分类号： H01S3/225 ,  G03F7/7055 ,  H01S3/1024 ,  H01S3/2251 ,  H01S3/2258 ,  H01S3/2333

摘要： The present invention provides long life optics for a modular, high repetition rate, ultraviolet gas discharge laser systems (Fig. 1B) producing a high repetition rate high power output beam (38). The invention includes solutions to a surface damage problem discovered by Applicants on CaF2 optics (4260) (422)(424)(426) located in high pulse intensity sections (10)(26) of the output beam (14C) of prototype laser systems. Embodiments include an enclosed (4) and purged beam path (14C) with beam pointing control (40A) (40B)(6) for beam delivery of billions of output laser pulses (38). Optical components and modules described herein are capable of controlling ultraviolet laser output pulses (14A) with wavelength less than 200nm with average output pulse intensities greater than 1.75×106 Watts/cm2 and with peak intensity or greater 3.5×106 Watts/cm2 for many billions of pulses (14A) as compared to prior art components and modules which failed after only a few minutes in these pulse intensities.

公开(公告)号：EP1502334A1

公开(公告)日：2005-02-02

申请号：EP03719926.2

申请日：2003-04-23

申请人： Cymer, Inc.

发明人： YAGER, Thomas, A. ,  PARTLO, William, N. ,  SANDSTROM, Richard, L. ,  PAN, Xiaojiang ,  MELCHIOR, John, T. ,  ALGOTS, John, M. ,  BALL, Matthew ,  ERSHOV, Alexander, I. ,  FLEUROV, Vladimir ,  GILLESPIE, Walter, D. ,  GLATZEL, Holger, K. ,  LUBLIN, Leonard ,  MARSH, Elizabeth ,  MORTON, Richard, D. ,  UJAZDOWKI, Richard, C. ,  WARKENTIN, David, J. ,  WEBB, R., Kyle

IPC分类号： H01S3/22

CPC分类号： H01S3/225 ,  G03F7/7055 ,  H01S3/1024 ,  H01S3/2251 ,  H01S3/2258 ,  H01S3/2333

摘要： The present invention provides long life optics for a modular, high repetition rate, ultraviolet gas discharge laser systems (Fig. 1B) producing a high repetition rate high power output beam (38). The invention includes solutions to a surface damage problem discovered by Applicants on CaF2 optics (4260) (422)(424)(426) located in high pulse intensity sections (10)(26) of the output beam (14C) of prototype laser systems. Embodiments include an enclosed (4) and purged beam path (14C) with beam pointing control (40A) (40B)(6) for beam delivery of billions of output laser pulses (38). Optical components and modules described herein are capable of controlling ultraviolet laser output pulses (14A) with wavelength less than 200nm with average output pulse intensities greater than 1.75×106 Watts/cm2 and with peak intensity or greater 3.5×106 Watts/cm2 for many billions of pulses (14A) as compared to prior art components and modules which failed after only a few minutes in these pulse intensities.

公开(公告)号：EP1108275A1

公开(公告)日：2001-06-20

申请号：EP99937789.8

申请日：1999-08-04

申请人： Cymer, Inc.

发明人： HOFMANN, Thomas ,  HOWEY, James, K. ,  SHANNON, Robert, A. ,  UJAZDOWSKI, Richard, C. ,  WATSON, Tom, A. ,  WEBB, R., Kyle

IPC分类号： H01S3/22

CPC分类号： G03F7/708 ,  H01S3/036 ,  H01S3/225

摘要： A tangential fan (140) and cutoff assembly for recirculating a lasing gas (108) mixture has blade members (144), which vary in circumferential position stepwise from end to end, and/or a tapered anode assembly (120). The number of blade members (144) can be constant or variable. The circumferential position of blade members (144) can shift monotonically or reversibly between ends. Blade members (144) are stiffened by optimally selecting the number and placement of hub members (212) to control the natural vibration frequency of the fan. Methods of forming tangential fans include casting and machining from a single block. Monolithic structures can be joined, typically from electron-beam welding. Casting, welding, and machining processes introduce no additional contaminants. Tangential fans produced have mechanical rigidity, accurate tolerances, and low contaminant concentrations. Blade members (144) can be formed into air foil shapes.