公开(公告)号：EP1726028A2

公开(公告)日：2006-11-29

申请号：EP05724572.2

申请日：2005-03-03

申请人： Cymer, Inc.

发明人： AKINS, Robert, P. ,  SANDSTROM, Richard, L. ,  PARTLO, William, N. ,  FOMENKOV, Igor, V. ,  STEIGER, Thomas, D. ,  ALGOTS, Martin, J. ,  BOWERING, Norbert, R. ,  JACQUES, Robert, N. ,  PALENSCHAT, Frederick, A. ,  SONG, Jun

IPC分类号： H01J35/20

CPC分类号： B82Y10/00 ,  G03F7/70033 ,  H05G2/003 ,  H05G2/008

摘要： An EUV light source apparatus and method are disclosed, which may comprise a pulsed laser providing laser pulses at a selected pulse repetition rate focused at a desired target ignition site; a target formation system providing discrete targets at a selected interval coordinated with the laser pulse repetition rate; a target steering system intermediate the target formation system and the desired target ignition site; and a target tracking system providing information about the movement of target between the target formation system and the target steering system, enabling the target steering system to direct the target to the desired target ignition site. The apparatus and method may comprise a vessel having and intermediate wall with a low pressure trap allowing passage of EUV light and maintaining a differential pressure across the low pressure trap.

公开(公告)号：EP1726028B1

公开(公告)日：2014-05-21

申请号：EP05724572.2

申请日：2005-03-03

申请人： Cymer, Inc.

发明人： AKINS, Robert, P. ,  SANDSTROM, Richard, L. ,  PARTLO, William, N. ,  FOMENKOV, Igor, V. ,  STEIGER, Thomas, D. ,  ALGOTS, Martin, J. ,  BOWERING, Norbert, R. ,  JACQUES, Robert, N. ,  PALENSCHAT, Frederick, A. ,  SONG, Jun

IPC分类号： H05G2/00 ,  G03F7/20

CPC分类号： B82Y10/00 ,  G03F7/70033 ,  H05G2/003 ,  H05G2/008