公开(公告)号：EP2351167A1

公开(公告)日：2011-08-03

申请号：EP09822306.8

申请日：2009-10-20

申请人： Cymer, Inc. (A Nevada Corporation)

发明人： YE, Hong ,  ROKITSKI, Rostislava ,  BERGSTEDT, Robert, A. ,  ERSHOV, Alexander, I. ,  LIU, Lauren ,  VIATELLA, John, W. ,  RAO, Rajasekhar, H. ,  CYBULSKI, Raymond, F. ,  DUFFEY, Thomas, P. ,  BROWN, Daniel, J. W. ,  FERRELL, James, J.

IPC分类号： H01S3/08

CPC分类号： G02B5/04 ,  G02B5/12 ,  H01S3/0057 ,  H01S3/0346 ,  H01S3/081 ,  H01S3/225

摘要： An aspect of the disclosed subject matter includes a method of reducing the laser absorption of a beam reverser prism consisting of at least one of the following: increasing a first distance between a first incident point and a chamfered corner, wherein the first incident point is on a first reflective surface of the prism and the chamfered corner is formed between the first reflective surface and a second reflective surface of the prism, wherein the chamfered corner has a chamfered surface; increasing a second distance between a second incident point and the chamfered corner, wherein the second incident point is on the second reflective surface of the prism; and increasing a reflectivity of the chamfered surface of the chamfered corner of the prism. A method of determining a prime cut for an optical component is also disclosed. A laser including at least one prime cut optical component is also disclosed.