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    METHOD AND APPARATUS FOR STABILIZING AND TUNING THE BANDWIDTH OF LASER LIGHT
    1.
    发明公开
    METHOD AND APPARATUS FOR STABILIZING AND TUNING THE BANDWIDTH OF LASER LIGHT 审中-公开
    方法和设备用于稳定和调节激光的带宽

    公开(公告)号：EP2137798A2

    公开(公告)日：2009-12-30

    申请号：EP08742695.3

    申请日：2008-04-09

    申请人： Cymer, Inc. (A Nevada Corporation)

    发明人： PARTLO, William, N. ,  JACQUES, Robert, N. ,  O'BRIEN, Kevin, M. ,  ISHIHARA, Toshihiko

    IPC分类号： H01S3/22

    CPC分类号： H01S3/1055 ,  G02B27/646 ,  H01S3/137 ,  H01S3/139 ,  H01S3/225 ,  H01S2301/02

    摘要： According to aspects of an embodiment of the disclosed subject matter, method and apparatus are disclose that ma y comprise adjusting a differential timing between gas discharges in the seed laser and amplifier laser for bandwidth control, based on the error signal, or for control of another laser operating parameter other than bandwidth, without utilizing any beam magnification control, or adjusting a differential timing between gas discharges in the seed laser and amplifier laser for bandwidth control, based on the error signal, or for control of another laser operating parameter other than bandwidth, while utilizing beam magnification control for other than bandwidth control, and adjusting a differential timing between gas discharges in the seed laser and amplifier laser for bandwidth control, based on the error signal, or for control of another laser operating parameter other than bandwidth, while utilizing beam magnification control for bandwidth control based on the error signal.