公开(公告)号：EP2952318A4

公开(公告)日：2016-10-19

申请号：EP14745457

申请日：2014-01-27

申请人： DAICEL CORP

发明人： MIZUTA TOMOYA ,  OSAKA TAKUYA ,  NAKAGUCHI KATSUHIRO ,  OKUMURA ARIMICHI ,  MIYAKE HIROTO ,  OMURA MASAYA ,  NISHIO NAOTAKA

IPC分类号： B29C33/40 ,  B29C59/02 ,  B81C99/00 ,  G03F7/20 ,  H01L21/027

CPC分类号： B29C43/36 ,  B29C33/0011 ,  B29C33/405 ,  B29C33/424 ,  B29C43/021 ,  B29C59/022 ,  B29C59/026 ,  B29K2883/00 ,  B29K2913/00 ,  B29L2031/757 ,  B81C99/009 ,  C08L83/04 ,  G03F7/0002 ,  C08L83/00

摘要： Provided is a sheet-shaped mold possessing a high strength and having a low breakage rate in demolding even in a case where the mold is thin and has a large-area. The sheet-shaped mold is prepared by combining a cured silicone rubber containing a polyorganosiloxane and a fiber for reinforcing the cured silicone rubber. The fiber may comprise a cellulose nanofiber. The sheet-shaped mold may have an uneven pattern on at least one surface (or side) thereof. The fiber may be surface-treated with a hydrophobizing agent. The fiber may formanonwoven fabric, and the nonwoven fabric may be impregnated with the cured silicone rubber. The cured silicone rubber may comprise a two-component curable silicone rubber having a polydimethylsiloxane unit. The sheet-shaped mold may be a mold for nanoimprint lithography using a photo-curable resin.