公开(公告)号：EP3007242B1

公开(公告)日：2019-09-04

申请号：EP14804218.7

申请日：2014-05-22

申请人： DENSO CORPORATION ,  NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY

发明人： TESHIGAHARA, Akihiko ,  KANO, Kazuhiko ,  AKIYAMA, Morito ,  NISHIKUBO, Keiko

IPC分类号： H01L41/187 ,  H01L41/316 ,  C23C14/06

公开(公告)号：EP3007242A1

公开(公告)日：2016-04-13

申请号：EP14804218.7

申请日：2014-05-22

申请人： DENSO CORPORATION ,  NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY

发明人： TESHIGAHARA, Akihiko ,  KANO, Kazuhiko ,  AKIYAMA, Morito ,  NISHIKUBO, Keiko

IPC分类号： H01L41/316 ,  C23C14/06 ,  H01L41/187

CPC分类号： H01L41/18 ,  C23C14/0052 ,  C23C14/06 ,  C23C14/0641 ,  C23C14/18 ,  C23C14/185 ,  C23C14/34 ,  C23C14/3464 ,  C23C14/46 ,  H01L41/187 ,  H01L41/316

摘要： A piezoelectric thin film (1) is formed through sputtering and consists essentially of scandium aluminum nitride. The carbon atomic content is 2.5 at% or less. When producing the piezoelectric thin film (1), scandium and aluminum are sputtered simultaneously on a substrate (21) from a scandium aluminum alloy target material (10) having a carbon atomic content of 5 at% or less in an atmosphere where at least nitrogen gas exists. The sputtering may be conducted also by applying an ion beam (31) on an opposing surface of the alloy target material at an oblique angle. Moreover, aluminum and scandium may be also sputtered simultaneously on the substrate from an Sc target material and an Al target material. As a result, a piezoelectric thin film which exhibits excellent piezoelectric properties and a method for the same can be provided.

公开(公告)号：EP4230994A1

公开(公告)日：2023-08-23

申请号：EP23150391.3

申请日：2023-01-05

申请人： TOKYO INSTITUTE OF TECHNOLOGY ,  DENSO CORPORATION

发明人： YAMAMOTO, Takatoki ,  NUKAZUKA, Akira ,  HAYAKAWA, Kei ,  KANO, Kazuhiko

IPC分类号： G01N15/02 ,  G01N15/10 ,  G01N15/12 ,  G01N15/00

摘要： An object identification method capable of quickly and accurately identifying a virus or the like is provided. An object identification method according to an aspect of the present disclosure includes feeding an object dispersed in a solvent to a micro-channel, and applying an AC (Alternating Current) voltage to a measurement electrode provided at the micro-channel and measuring an AC characteristic of the object when the object passes through the micro-channel. Then, a combined impedance and a phase are determined by using the measured AC characteristic, and the object is identified by using the determined combined impedance and the phase.

公开(公告)号：EP4442835A1

公开(公告)日：2024-10-09

申请号：EP22901000.4

申请日：2022-10-28

申请人： DENSO CORPORATION

发明人： HAYAKAWA, Kei ,  ASANO, Mana ,  NUKAZUKA, Akira ,  NAKAGAWA, Kazuhisa ,  NIIMOTO, Mai ,  KANO, Kazuhiko

IPC分类号： C12Q1/68 ,  G01N33/543

CPC分类号： C12Q1/68 ,  G01N33/543

摘要： An analysis method for a target substance (7A, 7B, 7C) includes: mixing a conjugate (1A, 1B, 1C) and a sample including the target substance to produce a mixture (21), the conjugate including a labeled substance (5A, 5B, 5C) and a first binding substance (3A, 3B, 3C) having activity to bind to the target substance; bringing the mixture into contact with a second binding substance (19, 19A, 19B, 19C) fixed to a base (12); and detecting a phenomenon caused by the labeled substance bound to the target substance that is bound to the second binding substance. The first binding substance is a substance including a nucleic acid, or a substance including an amino acid. The base is provided in each of regions (17A, 17B, 17C). The target substance to which the second binding substance binds is different among the regions.