公开(公告)号：EP3090452B1

公开(公告)日：2018-01-03

申请号：EP15709761.9

申请日：2015-02-10

申请人： Canon Kabushiki Kaisha

发明人： SAITO, Hiroshi ,  MURAKAMI, Shunsuke ,  HAYASHI, Jumpei ,  OSHIMA, Kanako ,  TANAKA, Hidenori

IPC分类号： H01L41/187 ,  C04B35/468

CPC分类号： H01L41/1871 ,  B06B1/06 ,  B41J2/14201 ,  C04B35/4682 ,  C04B35/49 ,  C04B2235/3203 ,  C04B2235/3206 ,  C04B2235/3208 ,  C04B2235/3215 ,  C04B2235/3236 ,  C04B2235/3244 ,  C04B2235/3248 ,  C04B2235/3262 ,  C04B2235/3281 ,  C04B2235/3298 ,  C04B2235/3409 ,  C04B2235/3418 ,  C04B2235/5445 ,  C04B2235/77 ,  C04B2235/785 ,  C04B2235/786 ,  C04B2235/79 ,  G02B27/0006 ,  H01L41/0471 ,  H01L41/0477 ,  H01L41/083 ,  H01L41/0973 ,  H01L41/18 ,  H02N2/001 ,  H02N2/106 ,  H02N2/163 ,  H04N1/00909 ,  H04N5/2253

摘要： There is provided a lead-free piezoelectric material having a satisfactory piezoelectric constant and mechanical quality factor in the range of device operating temperatures (from −30° C. to 50° C.). The piezoelectric material contains a main constituent containing a perovskite-type metal oxide expressed by the general formula (Ba1-xCax)a(Ti1-yZry)O3, where x, y and a satisfy the 0.030≦x

公开(公告)号：EP3098868B1

公开(公告)日：2017-11-22

申请号：EP16171516.4

申请日：2016-05-26

申请人： Seiko Epson Corporation

发明人： KITADA, Kazuya ,  OMOTO, Masayuki

IPC分类号： H01L41/187

CPC分类号： H01L41/18 ,  B41J2/14233 ,  B41J2002/14241 ,  B41J2202/03 ,  H01L41/047 ,  H01L41/0805 ,  H01L41/0973 ,  H01L41/1873 ,  H01L41/317 ,  H01L41/318

摘要： There is provided a piezoelectric element which includes a first electrode which is formed on a substrate, a piezoelectric layer which is formed on the first electrode, and is formed from a compound oxide having an ABO 3 type perovskite structure in which potassium (K), sodium (Na), niobium (Nb), and manganese (Mn) are provided, and a second electrode which is formed on the piezoelectric layer. The manganese includes bivalent manganese (Mn 2+ ), trivalent manganese (Mn 3+ ), and tetravalent manganese (Mn 4+ ). A molar ratio (Mn 2+ /(Mn 3+ +Mn 4+ )) of the bivalent manganese to a sum of the trivalent manganese and the tetravalent manganese is equal to or greater than 0.31.

公开(公告)号：EP3201121A1

公开(公告)日：2017-08-09

申请号：EP15771957.6

申请日：2015-09-30

申请人： Commissariat à l'Énergie Atomique et aux Énergies Alternatives ,  Université Grenoble Alpes

发明人： CASSET, Fabrice ,  BASROUR, Skandar ,  CHAPPAZ, Cédrick ,  DANEL, Jean-Sébastien

IPC分类号： B81B3/00 ,  H01L41/09 ,  H02N2/00

CPC分类号： B06B3/00 ,  B06B1/045 ,  B06B1/06 ,  B81B3/0021 ,  B81B3/0024 ,  B81B2201/032 ,  H01L41/094 ,  H01L41/18 ,  H01L41/25

摘要： The invention relates to a mechanical structure comprising a stack containing an active substrate (10) and at least one actuator (20) suitable for generating vibrations in the region of said active substrate, said stack comprising a basic structure for the amplification of said vibrations (30), arranged between said actuator and said active substrate, the structure being used to transmit and amplify said vibrations; and comprising at least one trench (Ti) arranged between said actuator and said active substrate. The invention also relates to a method for producing said structure, comprising the use of a temporary substrate.

摘要翻译： 本发明涉及一种机械结构，该机械结构包括包含有源衬底（10）和适于在所述有源衬底的区域中产生振动的至少一个致动器（20）的叠层，所述叠层包括用于放大所述振动的基本结构 布置在所述致动器和所述有源衬底之间，所述结构用于传输和放大所述振动; 并且包括布置在所述致动器和所述有源衬底之间的至少一个沟槽（Ti）。 本发明还涉及一种用于制造所述结构的方法，包括使用临时衬底。

公开(公告)号：EP3188266A1

公开(公告)日：2017-07-05

申请号：EP16195939.0

申请日：2012-06-21

申请人： Canon Kabushiki Kaisha

发明人： FURUTA, Tatsuo ,  SAITO, Hiroshi ,  KUBOTA, Makoto ,  AKASHI, Kenichi

IPC分类号： H01L41/047 ,  H02N2/16 ,  H01L41/187 ,  C04B35/468 ,  H01L41/253 ,  H02N2/14 ,  G02B7/00 ,  H01L41/257 ,  H01L41/29

CPC分类号： H01L41/312 ,  B82Y30/00 ,  C04B35/4682 ,  C04B35/49 ,  C04B35/495 ,  C04B35/6261 ,  C04B35/62685 ,  C04B35/63416 ,  C04B2235/3201 ,  C04B2235/3208 ,  C04B2235/3215 ,  C04B2235/3232 ,  C04B2235/3236 ,  C04B2235/3244 ,  C04B2235/3248 ,  C04B2235/3251 ,  C04B2235/3262 ,  C04B2235/3298 ,  C04B2235/442 ,  C04B2235/449 ,  C04B2235/5445 ,  C04B2235/5454 ,  C04B2235/656 ,  C04B2235/6562 ,  C04B2235/6567 ,  C04B2235/768 ,  G02B7/08 ,  H01L41/047 ,  H01L41/18 ,  H01L41/1871 ,  H01L41/1873 ,  H01L41/253 ,  H01L41/257 ,  H01L41/29 ,  H02N2/103 ,  H02N2/142 ,  H02N2/163 ,  Y10T29/42

摘要： A piezoelectric element that can decrease the output voltage for detection relative to the input voltage for driving without requiring a step-down circuit between a detection phase electrode and a phase comparator and an oscillatory wave motor including the piezoelectric element are provided. A piezoelectric element includes a piezoelectric material (1) having a first surface and a second surface, a common electrode (2) disposed on the first surface, and a drive phase electrode (3, 4) and a detection phase electrode (8) disposed on the second surface. An absolute value d(1) of a piezoelectric constant of the piezoelectric material in a first portion sandwiched between the drive phase electrode and the common electrode and an absolute value d(2) of a piezoelectric constant of the piezoelectric material in a second portion sandwiched between the detection phase electrode and the common electrode satisfy d(2)

摘要翻译： 提供一种压电元件，该压电元件能够相对于用于驱动的​​输入电压降低用于检测的输出电压，而不需要在检测相位电极和相位比较器之间的降压电路以及包括压电元件的振荡波电动机。 一种压电元件，包括具有第一表面和第二表面的压电材料（1），设置在所述第一表面上的公共电极（2）以及设置在所述第一表面上的驱动相电极（3,4）和检测相电极（8） 在第二个表面上。 夹在驱动相电极和公共电极之间的第一部分中的压电材料的压电常数的绝对值d（1）和夹在第二部分中的压电材料的压电常数的绝对值d（2） 在检测相电极和公共电极之间满足d（2）

公开(公告)号：EP2992608B1

公开(公告)日：2017-06-07

申请号：EP14723014.8

申请日：2014-04-23

申请人： Safran Electronics & Defense

发明人： ONFROY, Philippe

IPC分类号： H01L41/08 ,  H01L41/04 ,  H01L41/18 ,  H03L1/02

CPC分类号： H01L41/042 ,  H01L41/081 ,  H01L41/18 ,  H03L1/026

公开(公告)号：EP3136224A1

公开(公告)日：2017-03-01

申请号：EP16185274.4

申请日：2016-08-23

申请人： Immersion Corporation

发明人： KHOSHKAVA, Vahid ,  CRUZ-HERNANDEZ, Juan Manuel

IPC分类号： G06F3/16

CPC分类号： G08B6/00 ,  G06F3/016 ,  G06F3/03547 ,  G06F3/0488 ,  G06F2203/014 ,  H01L41/18 ,  H01L41/193

摘要： This disclosure relates to haptic feedback generators, including bistable materials for providing haptic feedback to a user. Such haptic feedback generators are useful in structural materials, such as elements of wearables or accessories.

摘要翻译： 本公开涉及触觉反馈发生器，包括用于向用户提供触觉反馈的双稳态材料。 这种触觉反馈发生器在诸如可穿戴物或附件的元件的结构材料中是有用的。

公开(公告)号：EP3132473A1

公开(公告)日：2017-02-22

申请号：EP15780688.6

申请日：2015-04-17

申请人： Northeastern University

发明人： RINALDI, Mateo ,  HUMMEL, Gwendolyn

IPC分类号： H01L41/00 ,  H01L41/18 ,  H03H3/02 ,  H03H9/15 ,  H03H9/54

CPC分类号： H03H9/133 ,  H01L41/18 ,  H01L45/06 ,  H01L45/141 ,  H01L45/144 ,  H03H3/0073 ,  H03H3/02 ,  H03H9/02228 ,  H03H9/131 ,  H03H9/205 ,  H03H9/54 ,  H03H2003/027 ,  H03H2009/155

摘要： A monolithic integration of phase change material (PCM) switches with a MEMS resonator is provided to implement switching and reconfiguration functionalities. MEMS resonator includes a piezoelectric material to control terminal connections to the electrodes. The PCM is operable between an ON state and an OFF state by application of heat, which causes the phase change material to change from an amorphous state to a crystalline state or from a crystalline state to an amorphous state, the amorphous state and the crystalline state each associated with one of the ON state and the OFF state. A method of fabricating the MEMS resonator with phase change material is provided. A reconfigurable filter system using the MEMS resonators is also provided.

摘要翻译： 提供了具有MEMS谐振器的相变材料（PCM）开关的单片集成以实现切换和重新配置功能。 MEMS谐振器包括用于控制与电极的端子连接的压电材料。 PCM通过施加热量在ON状态和OFF状态之间可操作，这导致相变材料从非晶状态转变为结晶状态或从结晶状态转变为非晶状态，非晶状态和结晶状态 每个与ON状态和OFF状态中的一个相关联。 提供了制造具有相变材料的MEMS谐振器的方法。 还提供了使用MEMS谐振器的可重构滤波器系统。

公开(公告)号：EP2899765B1

公开(公告)日：2016-12-21

申请号：EP15152515.1

申请日：2015-01-26

申请人： Korea Institute Of Machinery & Materials

发明人： Ryu, Jungho ,  Park, Dong-Soo ,  Yoon, Woon-Ha

IPC分类号： H01L41/08 ,  H01L41/22

CPC分类号： H01L41/125 ,  B32B37/18 ,  B32B38/0004 ,  B32B2307/20 ,  B32B2457/00 ,  H01L41/00 ,  H01L41/047 ,  H01L41/0533 ,  H01L41/082 ,  H01L41/083 ,  H01L41/18 ,  H02N2/18 ,  Y10T156/1052

公开(公告)号：EP2546393B1

公开(公告)日：2016-11-02

申请号：EP11753514.6

申请日：2011-03-09

申请人： Citizen Finedevice Co., Ltd.

发明人： HAYASHI, Takayuki ,  ARUGA, Toshimitsu ,  MATSUKURA, Makoto ,  ANZAI, Yutaka ,  MIYAMOTO, Akio ,  MATSUMURA, Sadao ,  FURUKAWA, Yasunori

IPC分类号： C30B29/22 ,  C30B33/02 ,  H01L41/18 ,  C30B15/00 ,  G01L9/08 ,  G01L23/10 ,  F02D35/02 ,  H01L41/41

CPC分类号： C30B29/22 ,  C30B15/00 ,  C30B33/02 ,  F02D35/023 ,  G01L9/08 ,  G01L23/10 ,  H01L41/1132 ,  H01L41/18 ,  H01L41/187 ,  H01L41/41

摘要： In accordance with the present invention, there is provided a method for producing a single LTGA crystal from a polycrystalline starting material prepared from a mixture of La 2 O 3 , Ta 2 O 5 , Ga 2 O 3 , and Al 2 O 3 , wherein a mixture having a composition represented by y(La 2 O 3 ) + (1-x-y-z)(Ta 2 O 5 ) + z(Ga 2 O 3 ) + x(Al 2 O 3 ) (in the formula, 0

公开(公告)号：EP3073540A1

公开(公告)日：2016-09-28

申请号：EP16161069.6

申请日：2016-03-18

申请人： Seiko Epson Corporation

发明人： SUMI, Koji ,  KOBAYASHI, Tomokazu ,  KITADA, Kazuya

IPC分类号： H01L41/08 ,  B41J2/14 ,  H01L41/187 ,  H01L41/317 ,  H01L41/319

CPC分类号： H01L41/0471 ,  B41J2/14233 ,  B41J2002/14241 ,  B41J2202/03 ,  B41J2202/11 ,  H01L41/0815 ,  H01L41/083 ,  H01L41/18 ,  H01L41/1873 ,  H01L41/25 ,  H01L41/253 ,  H01L41/314 ,  H01L41/318 ,  H01L41/319

摘要： A piezoelectric element (300) includes a first electrode (60) formed on a substrate, a piezoelectric layer (70) which is formed on the first electrode and includes a complex oxide with an ABO 3 -type perovskite structure represented by the following formula (1); and a second electrode (80) formed on the piezoelectric layer, in which a seed layer (65) including a complex oxide with an ABO 3 perovskite structure in which K and Nb are included between the first electrode and the piezoelectric layer, and the piezoelectric layer is formed from a polycrystal that is preferentially orientated on the (110) plane.

        (K X , Na 1-X )NbO 3      (1)

摘要翻译： 一种压电元件（300）包括形成在第一电极上并且包括具有由下式表示（在ABO 3型钙钛矿结构的复合氧化物形成在基板的第一电极（60），压电体层（70）的所有 1）; 和形成在压电层上的第二电极（80），在该籽晶层（65）包括与ABO 3钙钛矿结构的复合氧化物其中，k和Nb都包括在第一电极和压电层之间，以及压电 层是由即在（110）面优先取向的多晶体形成。 €€ƒƒƒ€€€ƒƒƒ€€€ƒƒ（X K，钠1-X）的NbO 3€€ƒƒƒ€€€ƒƒ（1）