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公开(公告)号：EP1913645A1
公开(公告)日：2008-04-23
申请号：EP06776713.7
申请日：2006-08-09
IPC分类号： H01L31/117 , H01L31/118 , H01L31/08 , H01L27/146 , G01T1/24 , G01T1/29
CPC分类号： H01L27/14618 , H01L27/14623 , H01L27/14659 , H01L2924/0002 , H01L2924/00
摘要： The invention relates an x-ray detector module comprising a plurality of silicium-drift detector cells which are arranged next to each other on a sensor chip. Said sensor chip is arranged in a recess of a frame-shaped base support, such that the sensitive chip surface lies in the opening of said frame-shaped base support. The aim of the invention is to improve the signal/base ratio. As a result, a mask (10) is fixed to the side of the base support (2) which is opposite to the recess, said mask covering the outer edge areas of external silicium-drift detector cells of the sensor chip (8) and ridges above the sensor chip (8) protrude into the opening of the base support (2). The ridges are arranged in such a manner that they cover the defining strips which are adjacent to the silicum drift detector cells, in order to protect the external edge areas and the defining strips which are covered by the mask (10) counter to the incident x-ray photons.
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公开(公告)号：EP1913645B1
公开(公告)日：2009-01-21
申请号：EP06776713.7
申请日：2006-08-09
IPC分类号： H01L31/117 , H01L31/118 , H01L31/08 , H01L27/146 , G01T1/24 , G01T1/29
CPC分类号： H01L27/14618 , H01L27/14623 , H01L27/14659 , H01L2924/0002 , H01L2924/00
摘要： The invention relates an x-ray detector module comprising a plurality of silicium-drift detector cells which are arranged next to each other on a sensor chip. Said sensor chip is arranged in a recess of a frame-shaped base support, such that the sensitive chip surface lies in the opening of said frame-shaped base support. The aim of the invention is to improve the signal/base ratio. As a result, a mask (10) is fixed to the side of the base support (2) which is opposite to the recess, said mask covering the outer edge areas of external silicium-drift detector cells of the sensor chip (8) and ridges above the sensor chip (8) protrude into the opening of the base support (2). The ridges are arranged in such a manner that they cover the defining strips which are adjacent to the silicum drift detector cells, in order to protect the external edge areas and the defining strips which are covered by the mask (10) counter to the incident x-ray photons.
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