公开(公告)号：EP3096867A4

公开(公告)日：2017-10-18

申请号：EP15737044

申请日：2015-01-15

申请人： ZEROK NANO TECH CORP

发明人： KNUFFMAN BRENTON J ,  STEELE ADAM V

IPC分类号： H01J27/24 ,  G01N27/64 ,  H01J27/02 ,  H01J37/08

CPC分类号： H01J27/24 ,  G01N27/64 ,  H01J27/022 ,  H01J37/08 ,  H01J2237/0815 ,  H01J2237/31701 ,  H01J2237/31749

摘要： A system and method for using a high-performance photoionization subsystem are disclosed. Embodiments of the present disclosure employ narrow bandwidth laser radiation to selectively excite ionizing resonant states of gaseous atoms in electric fields. This subsystem and method may be incorporated in an ion source producing ions by photoionizing gaseous atoms; the resultant ions may be employed to efficiently produce an ion beam of high brightness.

公开(公告)号：EP3096867A1

公开(公告)日：2016-11-30

申请号：EP15737044.6

申请日：2015-01-15

申请人： Zerok Nano Tech Corporation

发明人： KNUFFMAN, Brenton, J. ,  STEELE, Adam, V.

IPC分类号： B01D59/46 ,  H01J49/24 ,  G01N27/64

CPC分类号： H01J27/24 ,  G01N27/64 ,  H01J27/022 ,  H01J37/08 ,  H01J2237/0815 ,  H01J2237/31701 ,  H01J2237/31749

摘要： A system and method for using a high-performance photoionization subsystem are disclosed. Embodiments of the present disclosure employ narrow bandwidth laser radiation to selectively excite ionizing resonant states of gaseous atoms in electric fields. This subsystem and method may be incorporated in an ion source producing ions by photoionizing gaseous atoms; the resultant ions may be employed to efficiently produce an ion beam of high brightness.

公开(公告)号：EP2253009A4

公开(公告)日：2015-10-14

申请号：EP09709743

申请日：2009-02-11

申请人： PURDUE RESEARCH FOUNDATION

发明人： OUYANG ZHENG ,  HARPER JASON ,  CHARIPAR NICHOLAS ,  COOKS ROBERT

IPC分类号： H01J49/14 ,  H01J49/10 ,  H05H1/24

CPC分类号： H01J37/32009 ,  H01J27/022 ,  H01J37/00 ,  H01J37/32348 ,  H01J49/02 ,  H01J49/105 ,  H01J49/142 ,  H01J2237/0044 ,  H05H1/24 ,  H05H1/2406 ,  H05H1/30 ,  H05H2001/2412 ,  H05H2001/2443 ,  H05H2240/10 ,  H05H2240/20 ,  Y10T436/145555 ,  Y10T436/147777 ,  Y10T436/173076 ,  Y10T436/203332 ,  Y10T436/24

摘要： The present invention generally relates to a low temperature plasma probe for desorbing and ionizing at least one analyte in a sample material and methods of use thereof. In one embodiment, the invention generally relates to a low temperature plasma probe including: a housing having a discharge gas inlet port, a probe tip, two electrodes, and a dielectric barrier, in which the two electrodes are separated by the dielectric barrier, in which application of voltage from a power supply generates a low temperature plasma, and in which the low temperature plasma is propelled out of the discharge region by the electric field and/or the discharge gas flow.

公开(公告)号：EP2926116A1

公开(公告)日：2015-10-07

申请号：EP13884378.4

申请日：2013-12-24

申请人： Halliburton Energy Services, Inc.

发明人： PERKINS, David L. ,  FREESE, Robert Paul ,  JONES, Christopher Michael ,  GARDNER, Richard Neal

IPC分类号： G01N21/17 ,  G01N21/41 ,  G01B11/06

CPC分类号： G05B19/41875 ,  C23C14/30 ,  C23C14/547 ,  G01B11/0625 ,  G01B11/0683 ,  G01N21/211 ,  G01N21/25 ,  G01N21/8422 ,  G01N2021/213 ,  G05B2219/32368 ,  H01J27/022 ,  H01J27/08 ,  H01J37/3488

摘要： Techniques include receiving a design of an integrated computational element (ICE), the ICE design including specification of a substrate and a plurality of layers, their respective target thicknesses and complex refractive indices, complex refractive indices of adjacent layers being different from each other, and a notional ICE fabricated in accordance with the ICE design being related to a characteristic of a sample; forming at least some of the plurality of layers of the ICE in accordance with the ICE design; performing at least two different types of in-situ measurements; predicting, using results of the at least two different types of in situ measurements, performance of the ICE relative to the ICE design; and adjusting the forming of the layers remaining to be formed, at least in part, by updating the ICE design based on the predicted performance.

摘要翻译： 技术包括接收集成计算元件（ICE）的设计，ICE设计包括基板和多个层的规格，它们各自的目标厚度和复折射率，相邻层的复折射率彼此不同，以及 根据ICE设计制造的名义ICE与样品的特性相关; 根据ICE设计形成ICE的多个层中的至少一些层; 执行至少两种不同类型的原位测量; 使用至少两种不同类型的原位测量的结果预测ICE相对于ICE设计的性能; 并且至少部分地通过基于预测的性能更新ICE设计来调整形成剩余的层的形成。

公开(公告)号：EP2754167A1

公开(公告)日：2014-07-16

申请号：EP12769011.3

申请日：2012-08-29

申请人： Oerlikon Trading AG, Trübbach

发明人： KRASSNITZER, Siegfried ,  LENDI, Daniel ,  HAGMANN, Juerg

IPC分类号： H01J37/32

CPC分类号： H05H1/24 ,  H01J27/022 ,  H01J37/32045 ,  H01J37/32064

摘要： The present invention relates to a plasma source which is arranged in floating fashion on a vacuum chamber, wherein the plasma source comprises a source housing, and a filament is provided in the source housing and is arranged so as to be insulated therefrom, wherein means for measuring the potential drop between the source housing and the filament are provided. The measured potential drop can be used for regulating the voltage heating the filament. According to the invention, corresponding means are provided.

公开(公告)号：EP2635095A1

公开(公告)日：2013-09-04

申请号：EP11836404.1

申请日：2011-10-27

申请人： Kyocera Corporation

发明人： YAGI, Takashige ,  TOJYO, Tetsuya ,  MAKINO, Hiroshi

IPC分类号： H05H1/24 ,  F03H1/00 ,  H01T23/00

CPC分类号： H01J27/022 ,  B03C3/38 ,  B03C3/62 ,  B03C3/64 ,  B03C2201/14 ,  H01T23/00 ,  H05H1/2406 ,  H05H2001/2412 ,  H05H2001/2418 ,  H05H2001/2437

摘要： Provided is an ion wind generator capable of diversifying either or both of the amount of wind or wind direction. An ion wind generator (3) is provided with a first electrode (9), a second electrode (11) having a downstream area (11m) which is arranged at a position in a plan view shifted from first electrode (9) towards the positive side in the x direction, and a dielectric (7) between the first electrode (9) and the second electrode (11). In a plane view, the distance (d) in the x-direction from a downstream side edge (9b) of the first electrode (9) to the downstream side edge (11b) of the downstream area (11m) differs in the y-direction which is perpendicular to the x-direction.

摘要翻译： 提供了能够使风或风向的一方或两方多样化的离子风发生器。 离子风发生器（3）设置有第一电极（9），具有下游区域（11m）的第二电极（11），其布置在从第一电极（9）向正偏移的平面图中的位置 在第一电极（9）和第二电极（11）之间的电介质（7）。 在平面图中，从下游区域（11m）的第一电极（9）的下游侧边缘（9b）到下游侧边缘（11b）的x方向上的距离（d） 方向垂直于x方向。

公开(公告)号：EP2491770A1

公开(公告)日：2012-08-29

申请号：EP10825741.1

申请日：2010-10-22

申请人： Illinois Tool Works Inc.

发明人： GEFTER, Peter ,  PARTRIDGE, Leslie Wayne ,  NELSEN, Lyle Dwight

IPC分类号： H05F3/02

CPC分类号： H01T23/00 ,  H01J27/022 ,  H01J27/08 ,  H01T19/04 ,  H05F3/06

摘要： Self-balancing, corona discharge for the stable production of electrically balanced and ultra-clean ionized gas streams is disclosed. This result is achieved by promoting the electronic conversion of free electrons into negative ions without adding oxygen or another electronegative gas to the gas stream. The invention may be used with electronegative and/or electropositive or noble gas streams and may include the use of a closed loop corona discharge control system.

公开(公告)号：EP2489059A1

公开(公告)日：2012-08-22

申请号：EP10823919.5

申请日：2010-10-12

申请人： PerkinElmer Health Sciences, Inc.

发明人： FERRARA, Keith ,  BARKUS, David ,  PATKIN, Adam ,  MANNINO, Rosario ,  PENTEK, Daniel ,  DELORENZO, Frank ,  RASMUSSEN, Barton

IPC分类号： H01J27/02

CPC分类号： H01J49/068 ,  H01J3/38 ,  H01J27/022 ,  H01J49/067 ,  H01J49/10 ,  H01J49/26 ,  H01J2237/061

摘要： Certain embodiments described herein are directed to devices that can be used to align the components of a source assembly in a source housing. In some examples, a terminal lens configured to couple to the housing through respective alignment features can be used to retain the source components in a source housing to provide a source assembly.

公开(公告)号：EP1964148B1

公开(公告)日：2010-01-20

申请号：EP06848020.1

申请日：2006-12-20

申请人： AXCELIS TECHNOLOGIES, INC.

发明人： Reynolds, William ,  Hodgdon, Christopher ,  Divergilio, Wiliam ,  Tieger, Daniel ,  Joyce, Sean

IPC分类号： H01J37/08 ,  H01J37/317

CPC分类号： H01J37/3171 ,  B08B7/0035 ,  H01J27/022 ,  H01J37/08 ,  H01J2237/022 ,  H01J2237/31705

摘要： A deposit cleaning system for removing deposits from interior surfaces of ion sources includes a fluorine source, a throttle mechanism, and a controller. The fluorine source supplies fluorine to the ion source as a cleaning material. The throttle mechanism mitigates loss of fluorine through a source aperture of the ion source by at least partially covering the source aperture. The controller controls the supply and flow rate from the fluorine source to the ion source and also controls the positioning of the throttle mechanism.

公开(公告)号：EP1699067A3

公开(公告)日：2007-06-06

申请号：EP06100810.8

申请日：2002-03-26

申请人： CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS)

发明人： Gierak, Jacques ,  Lagadex, Yvon ,  Septier, Albert

IPC分类号： H01J27/22 ,  H01J27/02 ,  H01J37/305 ,  H01J37/30

CPC分类号： H01J27/26 ,  B82Y30/00 ,  H01J27/022 ,  H01J27/22 ,  H01J37/08 ,  H01J37/09 ,  H01J37/3007 ,  H01J37/3045 ,  H01J37/3056 ,  H01J2237/024 ,  H01J2237/0805 ,  H01J2237/1501 ,  H01J2237/1502 ,  H01J2237/30433 ,  H01J2237/3174

摘要： Ce procédé de réglage d'un faisceau d'ions, qui est émis par un dispositif de génération de faisceau d'ions vers une cible et qui est apte à éroder cette cible, comprend une étape de gravure d'un motif de test sur la cible, selon un motif de référence prédéterminé numérisé, une étape de formation d'une image numérisée du motif de test gravé et une étape de différenciation entre cette image numérisée du motif de test gravé et l'image numérisée du motif de référence prédéterminé, et l'on répète ces étapes après modification d'au moins un paramètre de réglage du dispositif, jusqu'à l'obtention d'un réglaçe convenable.
L'invention s'applique notamment à la fabrication de nano-structures.